Extra-cavity resonant ultraviolet laser generator
An ultraviolet laser and generation device technology, applied in the laser field, can solve the problems of increased structural complexity of solid-state laser devices, poor coherence of LED ultraviolet lasers, low safety factor of hydrogen ion lasers, etc., and achieve good output beam quality, simple structure, high The effect of performance stability
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[0017] see figure 1 , The present invention is an extra-cavity resonant ultraviolet laser generating device, including a second harmonic system 1 and a fourth harmonic system 2 . Among them, the second harmonic system 1 is an all-solid-state laser structure and outputs a laser with a central wavelength of 532nm, and the fourth harmonic system 2 is an extracavity resonant structure and outputs a laser with a central wavelength of 266nm. The second harmonic system 1 and The fourth harmonic system 2 is located on the same collimated optical path.
[0018] The second harmonic system 1 of the present invention is mainly composed of the LD pump source 1-1, the pump input coupling lens group 1-2, the second harmonic front-end three-color lens 1-3, and the laser working on the same collimated optical path. Material crystals 1-4, acousto-optic Q-switching components 1-5, 532nm laser harmonic lenses 1-6, second harmonic nonlinear optical frequency conversion crystals 1-7, second harmon...
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