Method and apparatus for silicon refinement
A metal silicon and silicon deposition technology, applied in the field of silicon refining, can solve problems such as the instability of alloy materials
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Embodiment 1
[0108] The chlorination chamber with a diameter of 34 cm and a height of 50 cm was loaded with 25 pieces of silicon-copper alloy with a total weight of 12 kg and a silicon concentration of 30 wt% or 3.6 kg. Place the blocks equidistant in the center of the chlorination chamber. After proper evacuation and filling of the chamber with process gases, the chlorination chamber was connected to a Siemens type polysilicon deposition chamber. The pressure in the chamber is maintained above atmospheric pressure. The alloy is heated to a temperature of 300°C to 400°C and the process gas is circulated between the chlorination chamber and the deposition chamber in a closed loop system. The chlorosilanes (mainly trichlorosilane) already produced in the chlorination chamber are consumed in the deposition chamber, and the exhaust gas from the deposition process (especially rich in HCl and STC) is used to generate new chlorosilanes (by and silicon alloy Reaction). The gas was circulated fo...
Embodiment 2
[0110] 4 pieces of silicon-copper alloy (total weight 1.3 kg, silicon amount 390 g) were placed in a chlorination chamber with a diameter of 15 cm and a height of 25 cm. The alloy is heated by an external heating device and the process gas is circulated by an external diaphragm pump. In the deposition chamber, a silicon filament is placed, which is heated to 1100° C. and which consumes the chlorosilanes produced. The chlorination and deposition chambers have been constructed in a connected arrangement in which part of the filament heat is used to heat the silicon-copper alloy. The deposition chamber and the chlorination chamber were separated by an intermediate plate (constructed from a quartz disc and a copper plate). The central hole allows for good gas exchange. Metallurgical grade silicon with a purity of 99.3% has been used for alloy casting. Within 30 hours, 210 g of silicon had been deposited on the hot wire. According to GDMS measurements (average of two measuremen...
Embodiment 3
[0112]A 10 kg block of approximately 1 ccm size was placed in a chlorination chamber with a diameter of 34 cm and a height of 50 cm. Bulks have been formed from a copper-silicon alloy with a silicon concentration of 30%. In 38 hours, 2 kg of purified silicon was deposited on a 210x10 mm filament with a height of 34 cm. The deposition temperature was 1100°C. The results of the impurity analysis are listed in Table 1, "Run 3.2-17".
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