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Device and method for measuring thickness of glass through multi-beam laser heterodyne second harmonic based on Doppler oscillating mirror sinusoidal modulation

A Doppler galvanometer and sine modulation technology, applied in the field of micro-displacement detection, can solve the problems of unsatisfactory operation speed of laser difference frequency signal signal processing, and achieve the effects of fast measurement speed, high measurement accuracy, and simple and easy processing.

Inactive Publication Date: 2012-01-25
HARBIN INST OF TECH
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Problems solved by technology

[0005] In order to solve the problem that the quality of the laser difference frequency signal collected by the existing dynamic angle measurement algorithm based on multi-beam laser heterodyne detection and the operation speed of signal processing are not ideal, the present invention proposes a Doppler vibrating mirror sinusoidal modulation multi-beam laser Device and Method for Measuring Glass Thickness by Heterodyne Second Harmonic

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  • Device and method for measuring thickness of glass through multi-beam laser heterodyne second harmonic based on Doppler oscillating mirror sinusoidal modulation
  • Device and method for measuring thickness of glass through multi-beam laser heterodyne second harmonic based on Doppler oscillating mirror sinusoidal modulation
  • Device and method for measuring thickness of glass through multi-beam laser heterodyne second harmonic based on Doppler oscillating mirror sinusoidal modulation

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specific Embodiment approach 1

[0019] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the device for measuring glass thickness by Doppler vibrating mirror sinusoidally modulating multi-beam laser heterodyne second harmonic wave in this embodiment, the device is composed of laser 1, polarizing beam splitter PBS2, quarter wave plate 3. The vibrating mirror 4, the plane mirror 5, the glass plate with the thickness to be measured 6, the converging lens 7, the photodetector 8 and the signal processing system 9 are composed. The linearly polarized light emitted by the laser 1 is reflected by the polarizing beam splitter PBS2 and then incident on the Quarter-wave plate 3, the light beam transmitted by the quarter-wave plate 3 is incident on the light-receiving surface of the oscillating mirror 4, and the light beam reflected by the oscillating mirror 4 is transmitted by the quarter-wave plate 3 again Sent to the polarizing beam splitter PBS2, the beam transmitted by t...

specific Embodiment approach 2

[0022] Embodiment 2: This embodiment is a further description of Embodiment 1, the laser 1 is H 0 solid-state lasers.

specific Embodiment approach 3

[0023] Specific embodiment three: this embodiment is a further description of embodiment one, two or three, the signal processing system 9 is composed of a filter 9-1, a preamplifier 9-2, an analog-to-digital converter A / D9-3 Composed of digital signal processor DSP9-4,

[0024] The filter 9-1 filters the received electrical signal output by the photodetector 8 and sends it to the preamplifier 9-2, and the signal amplified by the preamplifier 9-2 is output to the analog-to-digital converter A / D9-3, the analog-to-digital converter A / D9-3 sends the converted signal to the digital signal processor DSP9-4.

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Abstract

The invention discloses a device and a method for measuring thickness of glass through multi-beam laser heterodyne second harmonic based on Doppler oscillating mirror sinusoidal modulation, relates to the device and the method for measuring thickness of glass through multi-beam laser heterodyne second harmonic based on Doppler oscillating mirror sinusoidal modulation, and aims to solve the problems of non-ideal laser difference frequency signal quality and signal processing operation speed of a signal acquired by the conventional multi-beam laser heterodyne detection-based dynamic angle measuring algorithm. The method comprises the following steps of: adjusting positions of a plane mirror and a glass plate of which the thickness is to be measured; starting a laser while simple harmonic vibration is done by an oscillating mirror; and continuously acquiring an electric signal output by photoelectric detector through a signal processing system and processing the acquired signal to acquire the thickness of the glass plate of which the thickness is to be measured. The device and the method have the advantages of high laser difference frequency signal quality and high signal processing operation speed of the acquired signal, and can be widely applied to laser radar, machinery, instruments and meters and electronic product manufacturing industries.

Description

technical field [0001] The invention relates to a device and a method for measuring glass thickness by sinusoidally modulating a multi-beam laser heterodyne second harmonic with a Doppler vibrating mirror, and belongs to the technical field of micro-displacement detection. Background technique [0002] Precision glass thickness measurement is a problem that needs to be faced and solved in the engineering field. With the development of science and technology, thickness measurement methods are constantly being introduced, including optical measurement, interferometry and diffraction. These methods generally cannot meet the requirements of high-accuracy angle measurement. [0003] Since optical angle measurement has attracted much attention because of its non-contact, high precision and simple structure, the method using optical angle measurement has been more and more widely used. It is based on this situation that we propose a dynamic angle measurement algorithm based on mu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/06
Inventor 王春晖李彦超
Owner HARBIN INST OF TECH
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