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Self-supporting nano-transmission grating with high duty ratio and manufacturing method thereof

A technology of transmission grating and duty ratio, applied in diffraction grating, optics, opto-mechanical equipment, etc., can solve the problems of high cost and complicated process, and achieve the effect of reducing processing cost, improving diffraction efficiency and improving processing efficiency.

Active Publication Date: 2012-01-25
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to overcome the shortcomings of the existing nano-transmission grating with complex process and relatively high cost, the present invention proposes a new high-duty ratio self-supporting nano-transmission grating and its manufacturing method

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  • Self-supporting nano-transmission grating with high duty ratio and manufacturing method thereof
  • Self-supporting nano-transmission grating with high duty ratio and manufacturing method thereof
  • Self-supporting nano-transmission grating with high duty ratio and manufacturing method thereof

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Embodiment Construction

[0032] In the high duty ratio self-supporting nano transmission grating in this embodiment, both ends of the parallel nano transmission grating lines 2 are fixed on the nano transmission grating line fixing structure 3, and the nano transmission grating line fixing structure 3 The intermediate oxide layer 5 is integrated with the nano-transmission grating support structure 1, and the nano-transmission grating grid line 2 forms a structure suspended on the intermediate oxide layer 5 and the nano-transmission grating support structure 1; the gold absorber 4 covers the On the nano transmission grating grid line 2 and the nano transmission grating grid line fixed structure 3; the line width of the grid line structure is 0.5 μm, and the spacing is 0.5 μm; the thickness of the gold absorber 4 is 1 μm.

[0033] The fabrication method of the high-duty ratio self-supporting nano-transmission grating in this embodiment includes two parts: fabrication of a nano-grating mask and fabricatio...

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Abstract

The invention, which belongs to the MEMS field, discloses a self-supporting nano-transmission grating with a high duty ratio and a manufacturing method thereof. The grating comprises a nano-transmission grating supporting structure 1, a nano-transmission grating line fixing structure 2, nano-transmission grating lines 3, and a gold absorber 4. The manufacturing method comprises two parts: manufacture of a nano grating mask and manufacture of a nano transmission grating. More particularly, the method comprises the following steps that: on the condition of one-time alignment technology based ona normal lithography machine, partial exposure is carried out on a micronsized line and a metal is etched, so that the micronsized line is changed into a nano-line and graphic conversion of a size ofa nano structure is realized; and then the one-time alignment technology is carried out again to realize manufacture of a nano-transmission mask with a high duty ratio; at last, a nano-transmission grating with a high depth to width ratio is manufactured by taking the manufactured mask and using high density plasma etching. According to the invention, the self-supporting nano-transmission gratinghas advantages of a high depth to width ratio and a large duty ratio; and defects that a technology process is complex and costs are high in the prior art can be overcome.

Description

[0001] Field [0002] The invention belongs to the field of micro-electromechanical systems (MEMS), in particular to a self-supporting nano transmission grating with a high duty ratio and a manufacturing method thereof. Background technique [0003] Diffractive optical elements exist in a large number of space photodetectors, and are the core part of the working system, which determines the working state and key technical parameters of the system, especially in the vacuum ultraviolet, EUV and X-ray bands. However, the current nano-transmission grating has a small duty cycle and low diffraction performance. At the same time, electron beam lithography, X-ray lithography equipment, and nano-imprinting are mostly used in the manufacturing process to make nano-gratings. The process is relatively complicated and the cost is relatively high. [0004] American Pran Mukherjee et al. (Fabrication and testing of freestanding Si nanogratings for UV filtration on space-based particle senso...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00G02B5/18
Inventor 马志波姜澄宇苑伟政
Owner NORTHWESTERN POLYTECHNICAL UNIV
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