Multifunctional micro-plastic forming system

A microplastic and multifunctional technology, applied in the direction of microstructure technology, microstructure devices, etc., can solve the problems of single forming method and poor surface quality of formed parts
CN102344116BActive Publication Date: 2015-06-17INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
Publication Date
2015-06-17

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Abstract

The invention, belonging to the technical field of manufacturing parts of micro-electro-mechanical system, discloses a multifunctional micro-plastic forming system which can be used for extruding, forging, stamping, bending, incremental forming and a plurality of micro-plastic forming processes. The system comprises a support mechanism, a transmission mechanism, and a forming mechanism, wherein, the transmission mechanism is arranged on the support mechanism, and a die arranged on the forming mechanism is corresponding to a punch arranged on the transmission mechanism; a sample bench is fixed on an X-Y workbench, and the punch is connected with a pull-press sensor; and the sample bench is arranged in a vacuum cap, vacuum-pumping is carried out on the vacuum cap or protective gas is inserted in the vacuum cap to let the forming process be carried out in vacuum or protective atmosphere, so that the surface quality of a forming part is guaranteed. In addition, the pull-press sensor of the system can be used for compression tests and tension tests. According to the invention, the problems of single forming mode of the micro-plastic forming system and bad surface quality of the forming part caused by forming in high temperature atmosphere are solved.
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Description

Technical field:

[0001] The invention belongs to the technical field of manufacturing micro-electromechanical system (MEMS) components, and is a multi-functional micro-plastic forming system, which can be used for various micro-plastic forming including extrusion, forging, stamping, bending and incremental forming. Background technique:

[0002] Micro Electro Mechanical Systems (MEMS) is a new scientific and technological field developed on the basis of microelectronics technology combined with precision mechanical technology. With the increasing application of miniature components (micron level), such as printer punches, micro actuators, etc., MEMS has received more and more attention. Although traditional laser-based, LIGA (Lithographie GalVanoformung Abformung) and other microfabrication technologies can manufacture parts with precise dimensions, their practical application is greatly restricted due to the limitation that they cannot be mass-produced. Plastic forming has...

Claims

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