Source supplying unit, thin film depositing apparatus, and method for depositing thin film

A thin-film deposition device and a technology for supplying raw materials, applied to the thin-film deposition device and the field of depositing a thin film, can solve the problems of difficulty in adjusting the deposition speed and deposition quality, difficulty in adjusting the deposition speed and maintaining the deposition quality, etc., so as to achieve the effect of improving productivity.

Inactive Publication Date: 2014-05-14
SNU PRECISION CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this requires more heat to heat an enlarged tank and evaporate a deposition material
In addition, it is difficult to adjust the deposition rate and maintain the deposition quality due to evaporation and spraying of a large amount of deposition material
Difficult to adjust deposition rate and maintain deposition quality when utilizing a variety of deposition materials

Method used

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  • Source supplying unit, thin film depositing apparatus, and method for depositing thin film
  • Source supplying unit, thin film depositing apparatus, and method for depositing thin film
  • Source supplying unit, thin film depositing apparatus, and method for depositing thin film

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Embodiment Construction

[0036] Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings. This invention may, however, be embodied in different forms and should not be construed as limited to only the embodiments set forth herein. Rather, these embodiments are described so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art, and like reference numbers will be used to refer to like elements throughout.

[0037] figure 1 is a schematic diagram of a thin film deposition apparatus including a raw material supply unit according to an exemplary embodiment. figure 2 is a schematic diagram of a raw material supply unit according to an exemplary embodiment. At figure 2 , a cover member disposed outside an injector of the raw material supply unit has been removed.

[0038] see figure 1, the thin film deposition apparatus includes: a chamber 100; a substrat...

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PUM

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Abstract

Provided are a source supplying unit, a thin film depositing apparatus including the source supplying unit, and a method for depositing a thin film. The source supplying unit includes a liquefaction part configured to liquefy a source material, an evaporation part communicating with the liquefaction part to evaporate the liquefied source material, and an injector communicating with the evaporation part to inject the evaporated source material. The liquefaction part includes a pot having a cylinder shape to store the source material, a piston part inserted to a side of the pot to discharge the source material, and a liquefaction heating part configured to heat the pot to liquefy the source material. After a solid source material is liquefied, a necessary portion is evaporated from the source material and supplied, thus achieving large capacity in source material and minimizing the amount of heat consumed for evaporating and supplying the source material.

Description

technical field [0001] The present invention relates to a raw material supply unit, more specifically, to a raw material supply unit for evaporating a raw material and supplying the raw material, a thin film deposition apparatus including the raw material supply unit, and a A method of depositing a thin film. Background technique [0002] A solar cell is a semiconductor device for converting light energy into electrical energy by utilizing a photovoltaic effect, and has recently attracted increasing attention due to the depletion of fossil fuels. In particular, compound thin-film solar cells such as copper indium gallium selenide (CIGS) thin-film solar cells or cadmium telluride (CdTe) solar cells are fabricated through a relatively simple manufacturing process, so their Manufacturing costs are lower. In addition, this compound thin film solar cell has the same light conversion efficiency as other prior art solar cells. Therefore, compound thin-film solar cells are attrac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/205H01L21/02
CPCH01L21/67115C23C14/246
Inventor 姜敞晧南宫晟泰鲁俊瑞赵晃新尹亨硕裵勍彬
Owner SNU PRECISION CO LTD
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