Laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror
A technology of two-dimensional scanning mirror and active detection, which is applied in the directions of measuring devices, electromagnetic wave re-radiation, and radio wave measurement systems, etc., can solve the problems of complex structure, low work efficiency, and large optical loss, and achieve high scanning frequency and structure Simple, lightweight effect
Inactive Publication Date: 2012-04-25
XI AN JIAOTONG UNIV
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[0006] It can be seen from the above table that mechanical scanning has a large scanning angle, is less affected by temperature, and is suitable for lasers of various wavelengths, but the scanning speed is low, the structure is complex, the volume, quality, and power consumption are relatively large, and the price of high-speed motors also more expensive
Acousto-optic scanning can obtain high working frequency, but the scanning deflection angle is small, the light loss is large, and the working efficiency is very low
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[0016] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0017] Such as figure 1 As shown, the laser detection device is divided into four parts, 1. CPU; 2. Laser range finder; 3. Electrostatically driven MEMS two-dimensional scanning mirror; 4. Target to be detected.
[0018] Connect the I / O port of the CPU to the laser rangefinder, and control the pulse laser rangefinder to emit pulsed laser by changing the level on the IO port; the pulsed laser is irradiated onto the measured object through the MEMS two-dimensional scanning mirror, and the reflected light is captured by the laser The rangefinder receives and measures the distance of the target, and the pulse laser rangefinder is connected to the CPU through UART, and the measured distance information is input into the CPU; finally, the CPU uses the distance information to realize the detection of sensitive areas.
[0019] 1 generates a ...
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The invention discloses a laser active detector based on micromachine MEMS (Micro Electro Mechanical System) two-dimensional scanning mirror. A CPU (Central Processing Unit) generates a laser pulse control signal to control a laser ranging device to transmit a pulse laser, a laser beam is irradiated to a detected target after being scanned by a static driving MEMS two-dimensional scanning mirror, the laser beam is reflected to the laser ranging device, and the CPU is connected with the laser ranging device and realizes detecting on the target after information processing. The laser active detector disclosed by the invention has the characteristics of small volume, light weight, low power consumption, fast response speed, low price, impact resistance and the like.
Description
technical field [0001] The invention relates to laser imaging, in particular to a laser active detection device based on a MEMS two-dimensional scanning mirror. Background technique [0002] Laser detection technology has a history of more than 40 years. High-speed laser scanning technology has always been a bottleneck technology restricting the development of laser detection technology. Traditional laser scanning methods mainly include mechanical scanning and acousto-optic (electro) optical scanning, but these two scanning methods have certain limitations when used in laser active imaging guidance. Mechanical scanning is a relatively mature scanning technology, which uses the rotation or vibration of optical elements such as mirrors or transmission mirrors to change the propagation direction of the beam to achieve beam scanning. The acousto-optic (electro)-optic scanning uses the acousto-optic effect to change the propagation direction of the beam in space, that is, the a...
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Inventor 孙剑尤政张弛
Owner XI AN JIAOTONG UNIV