Measuring apparatus of micro electronic mechanical system (MEMS) two-dimension (2d) scanning mirror scanning angle

A technology of a two-dimensional scanning mirror and a micromechanical system is applied in the field of measuring devices for the scanning angle of a two-dimensional scanning mirror. Realization and subsequent improvement, simple structure, strong real-time effect
CN102435152AInactive Publication Date: 2012-05-02XI AN JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
XI AN JIAOTONG UNIV
Publication Date
2012-05-02
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a measuring apparatus of a micro electronic mechanical system (MEMS) two-dimension (2d) scanning mirror scanning angle. After being scanned by a micro mechanical 2 d scanning mirror, a laser beam irradiates on a semi-transparent and semi-reflection mirror. The semi-transparent and semi-reflection mirror beam irradiates on an object and rest light is reflected on a PSD detector. After detecting a laser, the PSD detector outputs two paths of analog voltage signals. After A / D conversion is performed to the two paths of the voltage signals output by the PSD through an A / D converting circuit, digital signals are output. In a structure of the invention, a circuit is simple. A measuring scope is large. Instantaneity is strong and precision is high.
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Description

technical field

[0001] The invention relates to a measuring device for the scanning angle of a two-dimensional scanning mirror, in particular to a measuring device for the scanning angle of a micromechanical system MEMS two-dimensional scanning mirror. Background technique

[0002] At present, with the maturity of Micro Electronic Mechanical System (MEMS) processing technology, the use of MEMS optical scanning mirror as the core scanning device is widely used in industry, military, aerospace, navigation and communication In addition to the characteristics of easy mass production and low price shared by MEMS devices, these optical scanning mirrors are derived from MEMS technology. Compared with traditional scanning mechanisms, MEMS scanning mechanisms also have small volume, high quality The advantages of light weight, low power consumption, and fast response. Since the biggest feature of MEMS is that it can work in a resonance state under different external or internal forc...

Claims

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