Measuring apparatus of micro electronic mechanical system (MEMS) two-dimension (2d) scanning mirror scanning angle

Abstract

The invention discloses a measuring apparatus of a micro electronic mechanical system (MEMS) two-dimension (2d) scanning mirror scanning angle. After being scanned by a micro mechanical 2 d scanning mirror, a laser beam irradiates on a semi-transparent and semi-reflection mirror. The semi-transparent and semi-reflection mirror beam irradiates on an object and rest light is reflected on a PSD detector. After detecting a laser, the PSD detector outputs two paths of analog voltage signals. After A / D conversion is performed to the two paths of the voltage signals output by the PSD through an A / D converting circuit, digital signals are output. In a structure of the invention, a circuit is simple. A measuring scope is large. Instantaneity is strong and precision is high.

Description

technical field [0001] The invention relates to a measuring device for the scanning angle of a two-dimensional scanning mirror, in particular to a measuring device for the scanning angle of a micromechanical system MEMS two-dimensional scanning mirror. Background technique [0002] At present, with the maturity of Micro Electronic Mechanical System (MEMS) processing technology, the use of MEMS optical scanning mirror as the core scanning device is widely used in industry, military, aerospace, navigation and communication In addition to the characteristics of easy mass production and low price shared by MEMS devices, these optical scanning mirrors are derived from MEMS technology. Compared with traditional scanning mechanisms, MEMS scanning mechanisms also have small volume, high quality The advantages of light weight, low power consumption, and fast response. Since the biggest feature of MEMS is that it can work in a resonance state under different external or internal forc...

AI Technical Summary

Problems solved by technology

At present, the method of measuring the rotation angle at each moment in the MEMS motion process mainly adopts the phase correlation method; and the phase correlation technology has the characteristics of less dependence on the gray level of the image, strong anti-interference ability and high matching accuracy. There are good results in displacement and image registration, but directly applied to the measurement of rotation angle, it is necessary to traverse and search within the range of measurement angle variation, the amount of calculation is very large, and the imaging of the image feature structure will be deformed during the rotation movement. Thus affecting the improvement of the measurement resolution, so the angle measurement of the MEMS two-dimensional scanning tube is not suitable for the phase correlation method

At the same time, for the spatial beam pointing measurement of high-precision laser scanning control system, angle sensors are often used directly, such as photoelectric autocollimator, photoelectric encoder disk, etc., but it is difficult to meet the requirements of measurement range and accuracy at the same time

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