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Coating method

A coating and wafer technology, which is applied to coatings, devices for coating liquid on the surface, instruments, etc., can solve problems such as vacuum bubbles, pad bead stacking, and pad bead distribution unevenness, and achieve device luminescence performance Improvement, low density, uniform dispersion effect

Inactive Publication Date: 2012-05-30
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Generally, the coating method of LCoS liquid crystal cell spacer is the method of solution spraying. Due to the small size of the spacer, when coating the surface of the LCoS wafer, the spacer is prone to uneven distribution and several spacers. Bead stacking phenomenon
The color 800×600 resolution of the display device makes the size of each pixel point on the order of microns, which will affect the luminous performance of the device, and in severe cases, it will lead to uneven thickness of the liquid crystal cell, and thus cause more serious problems such as vacuum bubbles

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] The embodiment of the present invention provides a coating method, the steps are as follows:

[0018] Use 3.00±0.02μm glass balls as the spacer, put the spacer into the dichloromethane solution to form a suspension; then put the suspension into an ultrasonic cleaner for a while, and use ultrasonic waves to make the Scatter the pad beads one by one, and then put the suspension on a magnetic stirrer for full stirring; place the LCoS wafer cleaned with acetone on the rotary table of the homogenizer, turn on the air pump to fix it, and suck an appropriate amount with a rubber straw The spacer bead suspension drops on the surface of the LCoS wafer, and under the high-speed rotation of the LCoS wafer driven by the rotary table of the glue homogenizer, a very thin solution film will be formed on the surface of the LCoS wafer, and the spacer beads (Spacer) will be obtained In order to achieve an ideal dispersion, after the organic solvent in the solution film on the surface of ...

Embodiment 2

[0020] The embodiment of the present invention provides a coating method, the steps are as follows:

[0021] Use 3.00±0.02μm glass balls as the spacer, put the spacer beads into the isopropanol solution to form a suspension; then put the suspension into the ultrasonic cleaner for a while, and use ultrasonic waves to make the spacer The beads were dispersed one by one, and then the suspension was fully stirred on a magnetic stirrer; the LCoS wafer cleaned with acetone was placed on the rotary table of the homogenizer, and after the air pump was turned on to fix it, a proper amount of The spacer bead suspension drops on the surface of the LCoS wafer, and under the high-speed rotation of the LCoS wafer driven by the rotating table of the glue homogenizer, a very thin solution film will be formed on the surface of the LCoS wafer, and the spacer beads (Spacer) will be obtained. Ideally, after the organic solvent in the solution film on the surface of the LCoS wafer volatilizes, the...

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PUM

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Abstract

The invention belongs to the technical field of manufacturing of liquid crystal on silicon (LCoS) micro display devices, and particularly relates to a coating method applied to manufacturing of an LCoS liquid crystal box. The method comprises the following steps of: putting lining beads into a volatile organic solvent to form suspension; putting the suspension into an ultrasonic cleaner to disperse the lining beads with ultrasonic waves; fully stirring the suspension with a magnetic stirring machine; rotating an LCoS wafer on the surface of which the suspension is titrated by using a spin coater to form a layer of solution film on the surface of LCoS wafer; and volatilizing the organic solvent in the solution film on the surface of the LCoS wafer to finish a process of coating the lining beads on the surface of the LCoS wafer. Due to the adoption of the coating method in the invention, the lining beads are dispersed more uniformly, the density is lower simultaneously, and the luminous performance of the device is remarkably improved.

Description

technical field [0001] The invention belongs to the technical field of manufacturing liquid crystal on silicon (LCoS) microdisplay devices, and in particular relates to a coating method applied to the manufacture of LCoS liquid crystal cells. Background technique [0002] Liquid crystal on silicon (LCoS) microdisplay is a new type of reflective liquid crystal microdisplay technology. It uses CMOS technology to make the active matrix on a silicon substrate, and the top surface is used as a reflective layer. The display panel is made by covering the top surface of the LCoS wafer with ITO glass and filling it with liquid crystal. [0003] In the manufacturing process of the LCoS liquid crystal cell, in order to precisely control the thickness of the cell and play a supporting role, spacers or spacers are used, and spacers are often used when the cell thickness is below 10 μm. Due to the small thickness of the cell, in order to obtain a uniform gap size, it is necessary to us...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05D1/26B05C5/00B05C13/02G02F1/1339
Inventor 胡明玮黄苒杜寰韩郑生林斌
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI