Ultraviolet and deep ultraviolet optical thin film element double-wavelength laser fluorescence spectrometer

Abstract

The invention discloses an ultraviolet and deep ultraviolet optical thin film element double-wavelength laser fluorescence spectrometer, which relates to the technical field of application of an optical thin film element. The spectrometer comprises an ArF laser excitation module, a KrF laser excitation module, a sample chamber, a fluorescence detection module and an experimental synchronous control module, wherein the ArF laser excitation module and the KrF laser excitation module emit and transmit laser; the laser is emitted into the sample surface of the sample chamber to produce fluorescence; the fluorescence generated by the excitation of a sample is emitted out of the sample chamber, is transmitted to the fluorescence detection module in an incidence way to carry out spectrum light split, and is detected by a photoelectric detector to convert a fluorescence signal into an electric signal; and the electric signal is transmitted to the experimental synchronous control module. In the spectrometer, two lasers of ArF laser and KrF laser are used as laser sources, so that the sensitivity of ultraviolet and deep ultraviolet fluorescence spectrum detection is improved, and the requirements of testing of an ultraviolet and deep ultraviolet waveband optical thin film weak fluorescence spectrum can be met.

Description

technical field [0001] The invention relates to the technical field of application of optical thin film elements, in particular to a dual-wavelength laser fluorescence spectrometer for ultraviolet and deep ultraviolet optical thin film elements. Background technique [0002] According to quantum theory, atomic or molecular energy bands contain a series of discrete energy level structures. When a substance absorbs electromagnetic radiation, the ground state or low-energy level electrons of atoms or molecules are excited to higher energy levels to form excited atoms or molecules. , the atoms or molecules in the excited state will emit light with the same or longer wavelength as the excitation light through the process of radiation transition, which is the so-called fluorescence, which is the principle of the fluorescence phenomenon. When the energy level structure contained in atoms or molecules is relatively complex, fluorescence of different wavelengths will be generated to ...

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Problems solved by technology

[0007] Aiming at the problems existing in the prior art that cannot well meet the needs of testing different thin film materials, easily interfere with fluorescent signals, and have very uneven luminous intensity, the present invention provides a dual-wavelength laser fluorescence spectrometer for ultraviolet and deep ultraviolet optical thin film components , will solve the problems existing in the current technology

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