Coaxial CCD (charge coupled device) imaging system applied to laser cutting

Abstract

The invention discloses a coaxial CCD (charge coupled device) imaging system applied to laser cutting, which belongs to the field of optoelectronics and can be applied to laser machining such as laser cutting, laser drilling and the like. The coaxial CCD imaging system comprises a low-power CCD imaging component, an upper high-power CCD imaging component and a lower high-power CCD imaging component which are used for imaging a workpiece on the same optical axis; laser enters horizontally and is focused on the workpiece for machining after being collected by a focusing lens group and reflected by a 45-degree laser total reflector; and the three CCD imaging components are used for coaxial imaging by means of laser machining. The three CCD imaging components need no special design and can adopt mature lens groups on the market, the imaging requirement of LED wafer laser cutting on high precision can be met, equipment cost is greatly reduced, and the coaxial CCD imaging system is of important significance for improving economic benefits of equipment manufacturers.

Description

technical field [0001] The invention relates to a coaxial CCD imaging system applied to laser cutting, which belongs to the field of optoelectronics and can be applied to laser cutting, laser drilling and other laser processing aspects. Background technique [0002] With the vigorous development of laser technology, the industrial application of laser processing is becoming more and more extensive. The application of laser processing to LED wafer cutting is a new processing technology developed in recent years. This technology was applied earlier abroad. The main manufacturers of related production equipment are: New Wave, JDSU, Laser Solution in the United States and Disco in Japan; At present, domestic laser companies such as Suzhou Delong and Shenzhen Han's have also begun to produce related equipment. In LED wafer cutting applications, especially in blue LED wafer cutting applications, ultraviolet lasers are mainly used as the cutting light source, and the width of the ...

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Problems solved by technology

In the patent, a CCD module with a small field of view and high magnification is installed under the workpiece, and the CCD module directly images the workpiece, so a commercial CCD mirror group can be used; in this patent, two CCDs are installed above the workpiece, respectively For the wide-angle CCD module and the small field of view high-magnification upper CCD module, the two CCD modules are imaged through the laser focusing lens; due to the imaging requirements of the CCD, a new dedicated laser focusing lens must be redesigned for the used laser focusing lens. CCD imaging lens group, instead of using the mature lens group on the market

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