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Operating circuit for micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer

A technology for scanning micromirrors and working circuits, applied in the field of spectral analysis instruments, can solve problems such as increasing the complexity of the instrument structure and increasing the difficulty of designing working circuits, and achieves the effects of reducing the difficulty of design, improving spectral repeatability, and simplifying the system structure

Active Publication Date: 2012-07-18
CHONGQING UNIV
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Problems solved by technology

At present, in foreign countries, the existing MEMS scanning micromirror spectrometer, in order to accurately measure the wavelength corresponding to the spectral signal, mainly adopts the detection method of laser scanning to measure the swing angle of the scanning micromirror, which not only increases the complexity of the instrument structure, And it increases the difficulty of designing the working circuit

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  • Operating circuit for micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer
  • Operating circuit for micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer

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Embodiment Construction

[0026] The technical solution of the present invention will be described in further detail below in conjunction with the accompanying drawings.

[0027] Such as figure 1 Shown is the circuit principle diagram of the working circuit of the MEMS scanning micromirror spectrometer of the present invention.

[0028] The working circuit of the MEMS scanning micromirror spectrometer is mainly composed of three modules: an oscillation signal module 1, a MEMS micromirror drive control module 2, and a spectral data acquisition module. It is composed of conversion circuit 4, FIFO memory 5, FPGA control circuit 6 and USB interface circuit 7. The oscillating signal module 1 provides an oscillating signal with a specific frequency for the MEMS micromirror drive control module 2, and the oscillating signal is divided into two channels after signal processing by the MEMS micromirror drive control module 2, one for the MEMS micromirror. The other way provides a periodic trigger signal for th...

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Abstract

The invention discloses an operating circuit for a micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer. The operating circuit mainly comprises three modules, namely an oscillation signal module, an MEMS micro-mirror drive control module and a spectroscopic data acquisition module, wherein the spectroscopic data acquisition module consists of a preamplification circuit, an analogue-to-digital (AD) conversion circuit, a first-in first-out (FIFO) storage, a field programmable gate array (FPGA) (or advanced RISC machine (ARM) and a singlechip) control circuit and a universal serial bus (USB) interface circuit. The MEMS micro-mirror drive control module performs closed-loop control over the MEMS scanning micro-mirror, so that the MEMS scanning micro-mirror vibrates at equal amplitude and equal frequency, the wavelength repeatability of the MEMS scanning micro-mirror spectrometer is improved; after periodic oscillation signals generated by the oscillation signal module are processed by the MEMS micromirror drive control module, periodic working signals are provided for the AD conversion circuit and the MEMS scanning micro-mirror at the same time, so that the AD conversion circuit and the MEMS scanning micro-mirror can work cooperatively; and therefore, periodic acquisition of spectroscopic data is realized. The operating circuit has the advantages that: the operating vibration of the MEMS scanning micro-mirror in the spectrometer is stable, the wavelength repeatability of the spectrometer is high, and the operating circuit is simple and is easy to realize.

Description

technical field [0001] The invention belongs to the technical field of spectrum analysis instruments, and relates to a working circuit of a MEMS (micro-electro-mechanical system) scanning micromirror spectrometer. Background technique [0002] Spectroscopic instruments are basic equipment for observing, analyzing and processing the structure and composition of substances by applying the principle of optical technology and spectral detection technology. Metallurgy, geology, petrochemicals, medicine and health, environmental protection, aerospace, space exploration, resources and hydrological survey and other fields have extremely important application value and broad market prospects, and are one of the most important optical instruments. [0003] MEMS technology is a high-tech cutting-edge technology that integrates various micro-processing technologies and applies modern information technology to design, process, manufacture, measure and control micro / nano materials. Vario...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/02G01J3/28
Inventor 温志渝张中卫聂秋玉王克园
Owner CHONGQING UNIV
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