Operating circuit for micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer

Abstract

The invention discloses an operating circuit for a micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer. The operating circuit mainly comprises three modules, namely an oscillation signal module, an MEMS micro-mirror drive control module and a spectroscopic data acquisition module, wherein the spectroscopic data acquisition module consists of a preamplification circuit, an analogue-to-digital (AD) conversion circuit, a first-in first-out (FIFO) storage, a field programmable gate array (FPGA) (or advanced RISC machine (ARM) and a singlechip) control circuit and a universal serial bus (USB) interface circuit. The MEMS micro-mirror drive control module performs closed-loop control over the MEMS scanning micro-mirror, so that the MEMS scanning micro-mirror vibrates at equal amplitude and equal frequency, the wavelength repeatability of the MEMS scanning micro-mirror spectrometer is improved; after periodic oscillation signals generated by the oscillation signal module are processed by the MEMS micromirror drive control module, periodic working signals are provided for the AD conversion circuit and the MEMS scanning micro-mirror at the same time, so that the AD conversion circuit and the MEMS scanning micro-mirror can work cooperatively; and therefore, periodic acquisition of spectroscopic data is realized. The operating circuit has the advantages that: the operating vibration of the MEMS scanning micro-mirror in the spectrometer is stable, the wavelength repeatability of the spectrometer is high, and the operating circuit is simple and is easy to realize.

Description

technical field [0001] The invention belongs to the technical field of spectrum analysis instruments, and relates to a working circuit of a MEMS (micro-electro-mechanical system) scanning micromirror spectrometer. Background technique [0002] Spectroscopic instruments are basic equipment for observing, analyzing and processing the structure and composition of substances by applying the principle of optical technology and spectral detection technology. Metallurgy, geology, petrochemicals, medicine and health, environmental protection, aerospace, space exploration, resources and hydrological survey and other fields have extremely important application value and broad market prospects, and are one of the most important optical instruments. [0003] MEMS technology is a high-tech cutting-edge technology that integrates various micro-processing technologies and applies modern information technology to design, process, manufacture, measure and control micro / nano materials. Vario...

AI Technical Summary

Problems solved by technology

At present, in foreign countries, the existing MEMS scanning micromirror spectrometer, in order to accurately measure the wavelength corresponding to the spectral signal, mainly adopts the detection method of laser scanning to measure the swing angle of the scanning micromirror, which not only increases the complexity of the instrument structure, And it increases the difficulty of designing the working circuit

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