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Method and device for preparing microtexture through laser photoetching assisted electrochemical deposition

A laser lithography and deposition device technology, applied in the field of laser lithography-assisted electrochemical deposition to prepare micro-textures, can solve the problems of poor substrate bonding performance, low strength, loose tissue, etc., and achieve controllable structure, short wavelength, and composition controllable effect

Inactive Publication Date: 2015-01-21
CHINA UNIV OF MINING & TECH
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Problems solved by technology

[0005] The purpose of the present invention is to provide a laser lithography-assisted electrochemical deposition method for preparing micro-texture and its device, which can solve the problems of low strength, loose structure and poor bonding performance with the substrate in the existing surface coating technology

Method used

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  • Method and device for preparing microtexture through laser photoetching assisted electrochemical deposition
  • Method and device for preparing microtexture through laser photoetching assisted electrochemical deposition
  • Method and device for preparing microtexture through laser photoetching assisted electrochemical deposition

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Embodiment 1

[0033] Example 1: The method for preparing micro-textures is to use pulsed laser lithography to photoetch the surface of the metal material that has been spin-coated with photoresist, then immerse it in a developer to remove the exposed photoresist, and then use electrochemical deposition The technology carries out the controlled electrodeposition of the composite coating on the surface of the material, and finally removes the unexposed photoresist, and obtains the surface composite coating with regular micro-texture on the surface of the metal material to maximize the surface tribological performance;

[0034] Specific steps are as follows:

[0035] 1. Preliminary preparation: prepare material samples and related equipment, establish the pulse laser lithography system device and electrochemical deposition device used; spin coating of photoresist on the surface of the substrate material: spin coating and drying with a homogenizer, at 70~ Dry for 20min at 110℃; adjust the solution n...

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Abstract

The invention discloses a method and a device for preparing a microtexture through laser photoetching assisted electrochemical deposition, and belongs to a method and a device for preparing a surface structured coating. The method comprises the following steps of: photoetching the surface of a metallic material, on which photoresist is previously spin-coated, by using a pulse laser photoetching technique; soaking in developing solution to remove the exposed photoresist; then performing controllable electrodeposition of a composite coating on the surface of the material by using an electrochemical deposition technology; and finally removing unexposed photoresist to obtain a surface composite coating with a regular microtexture on the surface of the metallic material to realize maximization of tribological performance of the surface. The device comprises a pulse laser photoetching system device and an electrochemical deposition device, wherein a laser photoetching system consists of a pulse laser module, an optical path transmission module and a three-dimensional moving module which are connected in sequence. The device has the advantage of controllable structure. The structure and the composition of the composite coating are controllable. The application range is wide. By combining the laser photolithographic machining technology and the electrochemical deposition technology, the maximization of the anti-friction and anti-wear property of the material surface is realized.

Description

Technical field [0001] The invention relates to a method and a device for preparing a surface structured coating, in particular to a method and a device for preparing a microtexture by laser photoetching assisted electrochemical deposition. technical background [0002] With the development of science and technology and human society, the service conditions of tribological materials have become more and more extreme and complicated, which puts forward higher and higher requirements for the wear resistance and anti-friction properties of the materials. On the basis of traditional tribological materials, through surface engineering technology research and development, surface anti-friction and wear-resistant coatings provide an effective and very vital solution for optimizing the tribological performance of mechanical systems and solving material wear. [0003] Metal electrodeposition is the most effective method for preparing composite coatings-it is a special surface layer formed b...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D5/02
Inventor 杨海峰刘磊郝敬斌朱华
Owner CHINA UNIV OF MINING & TECH
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