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Method for preparing three-dimensional fluid channel in transparent material

A technology of transparent materials and fluid channels, applied in manufacturing tools, welding equipment, laser welding equipment, etc., can solve the problems of different corrosion rates and low overall rates

Inactive Publication Date: 2012-08-08
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to overcome the above-mentioned problems of different corrosion rates in different directions and low overall rates after being irradiated by linearly polarized light, and provide a method for preparing a three-dimensional fluid channel in a transparent material, so as to achieve the same corrosion rate in different directions , The overall effect of faster corrosion rate

Method used

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  • Method for preparing three-dimensional fluid channel in transparent material
  • Method for preparing three-dimensional fluid channel in transparent material
  • Method for preparing three-dimensional fluid channel in transparent material

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Embodiment Construction

[0016] Below by embodiment the present invention will be further described, but should not limit protection scope of the present invention with this.

[0017] see first figure 1 . figure 1 It is a diagram of a device for preparing a uniform three-dimensional fluid channel by using a circularly polarized femtosecond laser in the present invention. The beam 1 output by the femtosecond laser has a center wavelength of 800 nm, a pulse width of 40 fs, and a repetition rate of 250 kHz. The light beam after passing through the polarizer 2 is linearly polarized light. Adjust the direction of the optical axis of the quarter glass slide 3 to make it 45° to the polarization direction of the incident linearly polarized light, thereby converting the linearly polarized light into circularly polarized light. Use the neutral attenuator 4 to control the energy of the beam at 1-2 μJ. After passing through the mirror 5, the light beam is focused 6 on the sample 7 by a microscope objective le...

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Abstract

The invention discloses a method for preparing a three-dimensional fluid channel in a transparent material. The complex three-dimensional fluid channel is prepared inside the transparent material by utilizing femtosecond lasers of circular polarization. The three-dimensional fluid channel prepared by the method disclosed by the invention has the advantages of same anisotropic etch rate and faster etch rate for a complex structure.

Description

technical field [0001] The invention relates to femtosecond laser processing, especially a method for preparing a three-dimensional fluid channel in a transparent material. Background technique [0002] Lab on a Chip (Lab on a Chip) is a chip that integrates micro-optic, micro-electric, micro-mechanical, micro-fluidic, etc. It has the advantages of low consumption, high efficiency and high sensitivity. . The traditional semiconductor photolithography method used to manufacture micro-nano devices is a two-dimensional processing method, the process is relatively complicated, and it is not suitable for three-dimensional processing. [0003] Due to its high intensity, high nonlinearity, and low thermal damage, femtosecond laser is especially suitable for three-dimensional micromachining of transparent materials. The currently popular methods for fabricating microfluidic channels using femtosecond lasers are laser irradiation and chemical etching. Recent studies have shown tha...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C99/00B23K26/00B23K26/70
Inventor 于晓明何飞程亚
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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