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39results about How to "Fast corrosion rate" patented technology

Silicon slice thinning method based on metal nano particle catalysis

The invention discloses a silicon slice thinning method based on metal nano particle catalysis in the technical field of microelectronics. The method comprises the following steps of: pretreating a silicon slice (100) or (111) at normal temperature by using acetone, a CP4-A solution and hydrofluoric acid so as to obtain a clean silicon surface; and preparing a thinning solution which is formed byuniformly mixing silver nitrate, hydrogen peroxide and hydrofluoric acid, putting the thinning solution into a water bath for preheating, immersing the silicon slice into the thinning solution, and thus obtaining an ultrathin silicon slice with a required thickness by controlling reaction time, temperature and a solution ratio. In the method, the silicon slice can be uniformly etched by using a metal nano particle catalysis characteristic at the first time; a silicon slice thinning process is simplified by using a one-step method; characteristics of wet etching at near normal temperature and normal pressure can be retained, so the ultrathin silicon slice with the thickness of less than 50 microns can be obtained; furthermore, an application range of metal nano particle catalysis silicon etching is expanded; and a new idea and a new technical measure can be supplied to the silicon slice thinning process.
Owner:NORTH CHINA ELECTRIC POWER UNIV (BAODING)

Uniform modification processing method of transparent medium microstructures

The invention provides a uniform modification processing method of transparent medium microstructures. The uniform modification processing method comprises the following steps: processing a transparent medium by using first laser so that a plurality of modification regions are formed on the processed transparent medium; immersing the modified transparent medium into a corrosion solution to corrode the modification regions, verifying processing uniformity of the transparent medium and forming a plurality of hollow microstructures. The invention provides the uniform modification processing method of the transparent medium microstructures, the first laser comprises laser for generating high-temperature lattices and laser for reprocessing the high-temperature lattices, a preset time interval is reserved between the laser for generating the high-temperature lattices and the laser for reprocessing the high-temperature lattice, when the transparent medium is processed, by light beams which reach the transparent medium at first, the high-temperature lattice can be generated at a gathering position of the light beams by the transparent medium, light beams which reach the transparent medium later immediately process the high-temperature lattice, so that the uniformity of the transparent medium processed by the method is good, and the ideal design effect can be achieved.
Owner:CENT SOUTH UNIV

Corrosive liquid for detecting layer damage layer after gallium oxide single crystal processing and detection method

The invention discloses a corrosive liquid for detecting surface layer damage after gallium oxide single crystal processing and a corrosion method. The corrosive liquid comprises a sulfuric acid solution and a phosphoric acid solution, wherein the sulfuric acid solution accounts for 10%-30% by volume, and the concentration is not lower than 98%, and the phosphoric acid solution accounts for 70-90%, and the concentration is not lower than 85%. The detection method comprises the following steps: preparing the corrosive liquid which comprises the following components in percentage by volume: 10-30% of sulfuric acid solution with the concentration not less than 98%, and 70-90% of the phosphoric acid solution with the concentration not lower than 85%; heating the corrosive liquid: heating the prepared corrosive liquid to 80-95 DEG C; carrying out corrosion: putting the gallium oxide single crystal wafer into the liquid for corrosion, wherein the corrosion time is 1-6 minutes; carrying out cleaning: taking out the corroded gallium oxide single crystal wafer, and cleaning the gallium oxide single crystal wafer in deionized water; and carrying out detecting: detecting the sub-surface damage of the cleaned gallium oxide single crystal wafer. The corrosive liquid provided by the invention has very good selective corrosivity, the surface layer damage of the corroded gallium oxide single crystal is clearly displayed, the corrosion temperature is relatively low, and the rate is high.
Owner:YANCHENG INST OF TECH

Method for improving thickness uniformity of single crystal piezoelectric film

The invention discloses a method for improving the thickness uniformity of a single crystal piezoelectric film, and belongs to the technical field of semiconductor manufacturing. According to the method for improving the thickness uniformity of the single crystal piezoelectric film, polarization processing is carried out according to the thickness distribution of the single crystal piezoelectric film on a support substrate, a first polarization surface is formed in a first thickness region, a second polarization surface is formed in a second thickness region which is thinner than the first thickness region, and the polarities of the first polarization surface and the second polarization surface are opposite. The anisotropic characteristic of the piezoelectric single crystal material is utilized, under the same corrosive liquid, the first polarization surface obtained through polarization of a thicker area is corroded at a high speed, and the second polarization surface obtained throughpolarization of a thinner area is corroded at a low speed, so that differential corrosion of different polarization surfaces of the single crystal piezoelectric film is achieved. Compared with the prior art, the method has the advantages that the thickness uniformity of the single crystal piezoelectric film can be optimized, and the thickness uniformity of the single crystal piezoelectric film isgreatly improved.
Owner:SHANGHAI NOVEL SI INTEGRATION TECH CO LTD

Test method for accelerating reproduction of salt spray corrosion pulverization effect of binding post of electric energy meter

The invention relates to a test method for accelerating reproduction of the salt spray corrosion pulverization effect of binding posts of an electric energy meter. The method comprises the following steps of: step 1, spraying salt spray to the binding post of the electric energy meter in a standard neutral salt spray test box, and continuously spraying the salt spray for 4 hours; 2, after finishing spraying, transferring the binding post of the electric energy meter into a damp-heat test box, and duration time being 20 h; 3, keeping the binding post of the electric energy meter in the damp-heat test box, and converting from a low-temperature and high-humidity damp stage to a high-temperature and low-humidity drying stage for 4 hours; step 4, maintaining a drying stage, and continuing the drying stage for 48 hours; and 5, repeating the steps 1-4 until a corrosion form distribution type and a corrosion area proportion are close to the actual corrosion form distribution type and corrosionarea proportion. Compared with constant and alternating salt spray test conditions in general standards, the test method has the advantages of higher corrosion speed and greatly improved test efficiency.
Owner:ELECTRIC POWER SCI & RES INST OF STATE GRID TIANJIN ELECTRIC POWER CO +2

A method for uniform modification and processing of transparent medium microstructure

The invention provides a uniform modification processing method of transparent medium microstructures. The uniform modification processing method comprises the following steps: processing a transparent medium by using first laser so that a plurality of modification regions are formed on the processed transparent medium; immersing the modified transparent medium into a corrosion solution to corrode the modification regions, verifying processing uniformity of the transparent medium and forming a plurality of hollow microstructures. The invention provides the uniform modification processing method of the transparent medium microstructures, the first laser comprises laser for generating high-temperature lattices and laser for reprocessing the high-temperature lattices, a preset time interval is reserved between the laser for generating the high-temperature lattices and the laser for reprocessing the high-temperature lattice, when the transparent medium is processed, by light beams which reach the transparent medium at first, the high-temperature lattice can be generated at a gathering position of the light beams by the transparent medium, light beams which reach the transparent medium later immediately process the high-temperature lattice, so that the uniformity of the transparent medium processed by the method is good, and the ideal design effect can be achieved.
Owner:CENT SOUTH UNIV
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