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Double-flexible-grinding-head magnetorheological polishing device

A magnetorheological polishing and polishing device technology, which is used in grinding drive devices, grinding/polishing equipment, and parts of grinding machine tools, etc., can solve the problem of inability to meet the requirements of CPP processing, large removal function shape, and lack of large diameter Optical components processing ability and other issues, to achieve significant engineering application value, meet static and dynamic stiffness, and achieve the effect of effective matching

Active Publication Date: 2012-08-15
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The Chinese patent (application number: 200810030898.1) titled "Magnetorheological Polishing Device for Large-Aperture Aspheric Optical Parts" discloses a six-axis vertical gantry magnetorheological polishing machine developed by the University of National Defense Science and Technology. The device is only equipped with a large-scale flexible grinding head, and the generated removal function has a large shape, which cannot meet the processing requirements of CPP; the Chinese patent titled "Magnetorheological polishing device for high-steep optical parts" ( Application number: 200810031898.3) discloses a six-axis vertical structure magnetorheological polishing machine developed by the University of National Defense Science and Technology. This device is only equipped with a small-sized flexible grinding head and does not have the processing capability of large-diameter optical components.
At present, there is no dual grinding head magnetorheological polishing method and device that can be used to process phase components (such as large-diameter CPP)

Method used

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Experimental program
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Effect test

Embodiment 1

[0053] figure 1 It is a structural schematic diagram of the dual flexible grinding head magnetorheological polishing device of the present invention, figure 2 It is the appearance layout diagram of the dual flexible grinding head magnetorheological polishing device of the present invention, image 3 It is a schematic diagram of the bed structure of the present invention. Such as Figure 1-Figure 3 As shown, the magnetorheological polishing device with dual flexible grinding heads of the present invention includes a bed 1, a large flexible grinding head 2, a small flexible grinding head 3, a large flow circulation system 4, a small flow circulation system 5, a cleaning system 6, The protective cover 7 and the measurement and control system connected with the above-mentioned parts. The bed 1 includes a horizontal base 101 , a vertical gantry 102 , an X axis 103 , a Y axis 104 , a first Z axis 105 and a second Z axis 106 . The vertical gantry 102 is fixed on the horizontal b...

Embodiment 2

[0068] The basic structure of this embodiment is the same as that of Embodiment 1, except that the diameter of the outer surface of the large polishing wheel 2022 in this embodiment is φ300mm, and the diameter of the small polishing wheel 3032 is φ50mm.

Embodiment 3

[0070] The basic structure of this embodiment is the same as that of Embodiment 1, except that the diameter of the outer surface of the large polishing wheel 2022 in this embodiment is φ400mm, and the diameter of the small polishing wheel 3032 is φ80mm.

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Abstract

The invention discloses a double-flexible-grinding-head magnetorheological polishing device. In the device, a vertical gantry of a bed body and an X-axis are both fixed on a horizontal base; a worktable is fixed on a sliding block of the X-axis; a Y-axis is fixed on a horizontal beam of the vertical gantry; and a first Z-axis and a second Z-axis are arrangedon the Y-axis in parallel. A large flexible grinding head is installed on the first Z-axis; and a small flexible grinding head is arranged on the second Z-axis. A high-flow circulation system connected with the large flexible grinding head and a low-flow circulation system connected with the small flexible grinding head are arranged on a trolley. A control cabinet is arranged at the rear part of the vertical gantry; and a circulation system cabinet and a cleaning system are arranged at the side surface of the vertical gantry. The double-flexible-grinding-head magnetorheological polishing device provided by the invention has the advantages of high accuracy, high rigidness, high stability and high dynamic property. The double-flexible-grinding-head magnetorheological polishing device not only can be used for processing of large-caliber phase elements, but also can be used for high-accuracy processing of large-caliber planar optical elements within the range of full caliber. The optimal matching of the processing efficiency and the processing accuracy can be realized.

Description

technical field [0001] The invention belongs to the field of optical manufacturing, and in particular relates to a dual-flexible grinding head magnetorheological polishing device, in particular to a dual-flexible grinding head magnetorheological polishing device for magnetorheological polishing of large-diameter, high-precision phase-like optical elements. Polishing device. Background technique [0002] Large-aperture continuous phase plate (CPP) is a new type of phase-like optical element with deep relief topological structure of continuous wave surface, which is mainly used for focal spot shaping and light intensity control of large laser devices. Compared with traditional phase elements such as Random Phase Plate (RPP), Kinoform Phase Plate (KPP) and Distribution Phase Plate (DPP), CPP has higher energy utilization High efficiency and more precise focal spot shape control characteristics are considered to be the most effective solution to achieve beam smoothing of large ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00B24B41/04B24B47/20B24B49/02
Inventor 何建国许乔黄文王洋吉方王亚军陈东生唐小会王健郑永成魏齐龙罗清刘坤吴祉群肖虹张云飞王新宽
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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