Double-flexible-grinding-head magnetorheological polishing device

A magnetorheological polishing and polishing device technology, which is used in grinding drive devices, grinding/polishing equipment, and parts of grinding machine tools, etc., can solve the problem of inability to meet the requirements of CPP processing, large removal function shape, and lack of large diameter Optical components processing ability and other issues, to achieve significant engineering application value, meet static and dynamic stiffness, and achieve the effect of effective matching
CN102632435AActive Publication Date: 2012-08-15INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
Publication Date
2012-08-15

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Abstract

The invention discloses a double-flexible-grinding-head magnetorheological polishing device. In the device, a vertical gantry of a bed body and an X-axis are both fixed on a horizontal base; a worktable is fixed on a sliding block of the X-axis; a Y-axis is fixed on a horizontal beam of the vertical gantry; and a first Z-axis and a second Z-axis are arrangedon the Y-axis in parallel. A large flexible grinding head is installed on the first Z-axis; and a small flexible grinding head is arranged on the second Z-axis. A high-flow circulation system connected with the large flexible grinding head and a low-flow circulation system connected with the small flexible grinding head are arranged on a trolley. A control cabinet is arranged at the rear part of the vertical gantry; and a circulation system cabinet and a cleaning system are arranged at the side surface of the vertical gantry. The double-flexible-grinding-head magnetorheological polishing device provided by the invention has the advantages of high accuracy, high rigidness, high stability and high dynamic property. The double-flexible-grinding-head magnetorheological polishing device not only can be used for processing of large-caliber phase elements, but also can be used for high-accuracy processing of large-caliber planar optical elements within the range of full caliber. The optimal matching of the processing efficiency and the processing accuracy can be realized.
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Description

technical field

[0001] The invention belongs to the field of optical manufacturing, and in particular relates to a dual-flexible grinding head magnetorheological polishing device, in particular to a dual-flexible grinding head magnetorheological polishing device for magnetorheological polishing of large-diameter, high-precision phase-like optical elements. Polishing device. Background technique

[0002] Large-aperture continuous phase plate (CPP) is a new type of phase-like optical element with deep relief topological structure of continuous wave surface, which is mainly used for focal spot shaping and light intensity control of large laser devices. Compared with traditional phase elements such as Random Phase Plate (RPP), Kinoform Phase Plate (KPP) and Distribution Phase Plate (DPP), CPP has higher energy utilization High efficiency and more precise focal spot shape control characteristics are considered to be the most effective solution to achieve beam smoothing of large ...

Claims

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