Double-flexible-grinding-head magnetorheological polishing device

Abstract

The invention discloses a double-flexible-grinding-head magnetorheological polishing device. In the device, a vertical gantry of a bed body and an X-axis are both fixed on a horizontal base; a worktable is fixed on a sliding block of the X-axis; a Y-axis is fixed on a horizontal beam of the vertical gantry; and a first Z-axis and a second Z-axis are arrangedon the Y-axis in parallel. A large flexible grinding head is installed on the first Z-axis; and a small flexible grinding head is arranged on the second Z-axis. A high-flow circulation system connected with the large flexible grinding head and a low-flow circulation system connected with the small flexible grinding head are arranged on a trolley. A control cabinet is arranged at the rear part of the vertical gantry; and a circulation system cabinet and a cleaning system are arranged at the side surface of the vertical gantry. The double-flexible-grinding-head magnetorheological polishing device provided by the invention has the advantages of high accuracy, high rigidness, high stability and high dynamic property. The double-flexible-grinding-head magnetorheological polishing device not only can be used for processing of large-caliber phase elements, but also can be used for high-accuracy processing of large-caliber planar optical elements within the range of full caliber. The optimal matching of the processing efficiency and the processing accuracy can be realized.

Description

technical field [0001] The invention belongs to the field of optical manufacturing, and in particular relates to a dual-flexible grinding head magnetorheological polishing device, in particular to a dual-flexible grinding head magnetorheological polishing device for magnetorheological polishing of large-diameter, high-precision phase-like optical elements. Polishing device. Background technique [0002] Large-aperture continuous phase plate (CPP) is a new type of phase-like optical element with deep relief topological structure of continuous wave surface, which is mainly used for focal spot shaping and light intensity control of large laser devices. Compared with traditional phase elements such as Random Phase Plate (RPP), Kinoform Phase Plate (KPP) and Distribution Phase Plate (DPP), CPP has higher energy utilization High efficiency and more precise focal spot shape control characteristics are considered to be the most effective solution to achieve beam smoothing of large ...

AI Technical Summary

Problems solved by technology

The Chinese patent (application number: 200810030898.1) titled "Magnetorheological Polishing Device for Large-Aperture Aspheric Optical Parts" discloses a six-axis vertical gantry magnetorheological polishing machine developed by the University of National Defense Science and Technology. The device is only equipped with a large-scale flexible grinding head, and the generated removal function has a large shape, which cannot meet the processing requirements of CPP; the Chinese patent titled "Magnetorheological polishing device for high-steep optical parts" ( Application number: 200810031898.3) discloses a six-axis vertical structure magnetorheological polishing machine developed by the University of National Defense Science and Technology. This device is only equipped with a small-sized flexible grinding head and does not have the processing capability of large-diameter optical components.

At present, there is no dual grinding head magnetorheological polishing method and device that can be used to process phase components (such as large-diameter CPP)

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