Optical sensing system based on planar optical waveguide

Abstract

The invention provides an optical sensing system based on a planar optical waveguide. The system comprises an optical sensor integratedly arranged on a CMOS chip and an operation circuit connected with the optical sensor. The optical sensor is formed by a sensing unit array. The sensing unit comprises the planar optical waveguide, a coupling grating and a PN junction. The coupling grating couples an optical signal output by the planar optical waveguide to the PN junction. The PN junction is connected with the operation circuit. The system of the invention has the following advantages that: the planar optical waveguide and the optical sensor are integrated on the same chip through a COMS technology; a structure is simple; the system is processed easily and is suitable for large-scale production.

Description

【Technical field】 [0001] The invention relates to the field of optical sensing, in particular to an optical sensing system based on a planar optical waveguide. 【Background technique】 [0002] At present, as an important branch of information science and technology, optical sensing technology has very important applications in many aspects such as optical communication, industrial process control, environmental monitoring and national security. Optical sensing technology can solve the problems of low sensitivity, susceptibility to interference, long sensing time, and unsafe detection of certain chemical gases in electrical sensing technology; in contrast, optical sensors have high sensitivity, small size, It has many advantages such as strong anti-electromagnetic interference ability, easy integration, and online detection. Therefore, in the field of sensing, light sensing plays an increasingly important role. [0003] In recent years, as a very important member of sensor t...

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Problems solved by technology

However, since there have been no major breakthroughs in structural design and production technology, this type of sensor has been limited by the size and materials of optical devices. etching or nanoimprint technology) and it is difficult to simultaneously integrate complex optoelectronic properties on a single chip

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