Focusing device and method of flat high-field asymmetric waveform ion mobility spectrometer

A waveform ion migration, high-field asymmetric technology, applied in electron/ion optical devices, mass spectrometers, dynamic spectrometers, etc., can solve the problems of reduced resolution, lack of focusing ability, etc. Easy to integrate effects

Active Publication Date: 2012-10-10
TSINGHUA UNIV
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Problems solved by technology

Both of these two structures have shortcomings: due to the lack of focusing ability due to the flat plate structure, the ions ionized by the ion source will diffuse in the entire migration area and vibrate up and down driven by the asymmetric electric field; when When the DC scanning compensation voltage is a certain value, the net displacement of ions in one rad

Method used

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  • Focusing device and method of flat high-field asymmetric waveform ion mobility spectrometer
  • Focusing device and method of flat high-field asymmetric waveform ion mobility spectrometer
  • Focusing device and method of flat high-field asymmetric waveform ion mobility spectrometer

Examples

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Embodiment 1

[0032] Acetone was detected by ion-focusing high-field asymmetric waveform ion mobility spectrometer. Carrier gas 1 carries acetone into the ion mobility spectrometer. According to the ionization characteristics of the ion source 2, the carrier gas 1 is 99.999% high-purity nitrogen, and the flow rate is determined to be 0.96L / min. The asymmetric waveform RF power supply 10 generates an asymmetric waveform RF voltage with a frequency of 1 MHz and a duty cycle of 30%, which is applied to the electrode 6 in the upper transition region. The ionized acetone ions are focused under the action of the focusing area 11, the width of the ion beam is reduced, and then enter the migration area 3, the asymmetric waveform RF voltage makes the acetone ions separate from the impurity ions in the carrier gas in the migration area, and finally pass the control The DC scanning compensation power supply 9 obtains the real-time curve of the corresponding relationship between the DC scanning compen...

Embodiment 2

[0039] The ion-focusing high-field asymmetric waveform ion mobility spectrometer is system-integrated using MEMS technology. The ion source 2 is a corona discharge ion source with a cylindrical structure, and the detection unit 8 is a microarray Faraday cage with a cylindrical structure. Both the ion source 2 and the detection unit 8 can be formed by etching a conductive silicon wafer through an ICP process. The upper substrate 4 and the lower substrate 5 are made of borosilicate glass. The upper migration region electrode 6, the lower migration region electrode 7, the focusing electrode pair 12, the focusing electrode pair 13, the focusing electrode pair 14, the focusing electrode pair 15, and the focusing electrode pair 16 pass on the borosilicate glass. Sputtered Ti / Pt / Au metal (thickness Ti: 400 ;Pt: 300 Au: 900 ). The substrate is assembled by bonding process. In the experiment, the negative corona discharge mode was used to ionize the acetic acid sample carried ...

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Abstract

The invention discloses a focusing device and a focusing method of a flat high-field asymmetric waveform ion mobility spectrometer. The flat high-field asymmetric waveform ion mobility spectrometer comprises an ion source, a mobility area and a detection unit, wherein an upper substrate and a lower substrate are placed in parallel in the mobility area; an upper mobility area electrode and a lower mobility area electrode are respectively arranged on the upper substrate and the lower substrate; and the upper mobility area electrode is connected with an asymmetric waveform radio frequency power supply and a direct current scanning compensation power supply. The focusing device is characterized in that at least one focusing area is arranged at the front end of the mobility area; and at least one focusing polar plate pair is arranged on each of the upper and lower substrates of each focusing area. The focusing method employing the focusing device is characterized in that voltage is applied to each focusing polar plate pair, so ions are gathered to the center before entering the mobility area; the applied voltage has two modes, namely a direct current focusing mode and a radio frequency focusing mode; in the direct current focusing mode, the same direct current voltage is applied to the focusing polar plate pair at intervals; and in the radio frequency focusing mode, sine radio frequency voltage is applied to each focusing polar plate pair, and the difference of the radio frequency voltage phases of the adjacent focusing polar plate pairs is 180 DEG.

Description

technical field [0001] The invention relates to the measurement of biochemical substances, belongs to the field of on-site analysis and detection, and specifically relates to a device and method for focusing ion beams and improving the resolution of a flat-plate high-field asymmetric waveform ion mobility spectrometer. Background technique [0002] High-field Asymmetric Waveform Ion Mobility Spectrometry (FAIMS, High-field Asymmetric Waveform Ion Mobility Spectrometry) is a biochemical substance detection technology gradually developed in the 1990s. It mainly uses the characteristics that the mobility of ions under high electric field will vary with the change of electric field strength to separate and detect different kinds of biochemical substances. Its basic principle is as follows: under low electric field conditions, the mobility coefficient of ions has nothing to do with the electric field strength; when the electric field strength reaches a certain value (E / N>40Td)...

Claims

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Application Information

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IPC IPC(8): H01J49/06H01J49/40
Inventor 唐飞徐初隆王晓浩
Owner TSINGHUA UNIV
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