Film capacitor element, film capacitor, and method of producing the film capacitor element
A technology for thin film capacitors and a manufacturing method, which is applied in the directions of thin film/thick film capacitors, fixed capacitor dielectrics, capacitors, etc., can solve the problems of slow deposition rate of vapor-deposited polymer films, difficulty in meeting the requirements of thin film capacitors, and reduced productivity. Effects of improving relative dielectric constant, high withstand voltage, and excellent productivity
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[0029] In order to further illustrate the present invention, specific embodiments of the present invention will be described with reference to the accompanying drawings.
[0030] first, figure 1 One embodiment of a film capacitor element according to the invention is shown in vertical section. like figure 1 As shown, the thin film capacitor element 10 of this embodiment includes a metallized film 15 including a metal vapor-deposited film 14a and a resin film 12 serving as a dielectric film on the surface of the metal vapor-deposited film 14a. Film capacitor element 10 further includes, on metallized film 15 , metal vapor-deposition film 14 b on the side opposite to metal vapor-deposition film 14 a (the other surface of resin film 12 ) and vapor-deposited polymer film 16 on metal vapor-deposition film 14 b. That is, in the present embodiment, thin film capacitor element 10 is a laminate including metal vapor-deposition film 14a, resin film 12, metal vapor-deposition film 14b,...
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