Field strength diffusion method of solar cell

A technology of solar cell and diffusion method, which is applied in the field of field strength diffusion of solar cells, and can solve the problems of inconsistent PN junction depth of solar cells, inconsistent photoelectric conversion performance of solar cells, and difficulty in high-temperature sintering, etc. , to achieve the effects of reduced impurity molecules, short diffusion time, and reduced sintering difficulty

Inactive Publication Date: 2012-10-17
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Problems solved by technology

Because the high-temperature diffusion furnace tubes used in the prior art are usually large, the temperature difference in the furnace is large, and the diffusion effect is inconsistent, resulting in inconsistent photoelectric c...

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  • Field strength diffusion method of solar cell

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Embodiment Construction

[0009] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0010] see figure 1 , the present invention provides a kind of diffusion method of solar cells, it is characterized in that, comprises the following steps: put the solar cells loaded on the dischargeable graphite boat 11 into HPEVCD (plasma enhanced chemical vapor deposition) refitted through high temperature resistance performance ) in the reaction chamber 10 of the equipment, the number of sheets per boat is 252, and the size of the solar cell sheet is 156mm*156mm; the graphite boat 11 is connected to the electrode of the HPEVCD device; the temperature in the reaction chamber 10 Raise the temperature to 850°C; feed phosphine, oxygen and nitrogen into the reaction chamber 10, wherein the flow rate of phosphine is 0.5-1L / min, the flow rate of oxygen is 0.5-1L / min, and the flow rate of nitrogen is 5-10L / min, and automatically control the press...

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Abstract

The invention provides a field strength diffusion method of a solar cell and is characterized by comprising the following steps: placing the solar cell loaded on a dischargeable graphite boat in a high temperature diffusion furnace, wherein electrodes for high-frequency discharge are arranged in the high temperature diffusion furnace and the graphite boat is connected with the electrodes; increasing the temperature in the high temperature diffusion furnace to 850 DEG C; introducing phosphorane, oxygen and nitrogen in the high temperature diffusion furnace, wherein the flux of phosphorane is 0.5-1 L/min, the flux of oxygen is 0.5-1 L/min, the flux of nitrogen is 5-10 L/min, and the pressure in the high temperature diffusion furnace is automatically controlled to be 170 Pa; applying high frequency power source on the graphite boat through the electrodes so that the graphite boat discharge to the solar cell, wherein the discharge power of the high frequency power source is 3000W to 5000W, the discharge time is 120s, and the diffusion is finished when discharge is ended.

Description

technical field [0001] The invention relates to a diffusion method of a solar cell, in particular to a field strength diffusion method of a solar cell with a shorter diffusion time. Background technique [0002] The principle of solar cell power generation is to use the photovoltaic effect of the PN junction to convert light energy into electrical energy. Since the PN junction is the core structure of the solar cell, the structure of the PN junction directly affects the performance of the solar cell, so the diffusion step in the manufacturing process of the solar cell plays a key role in the performance of the solar cell. The manufacture of the PN junction of the solar cell is mainly completed by a diffusion process. At present, the diffusion process in the semiconductor industry, the LED industry, and the photovoltaic industry all use high-temperature diffusion. The diffusion time of each batch of products is as long as several hours, which consumes a lot of energy and the...

Claims

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Application Information

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IPC IPC(8): H01L31/18C30B31/08
CPCY02P70/50
Inventor CHEN BIXIONG
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