Reflecting type array waveguide grating based on multiple-mode interferometer reflector

Abstract

The invention provides a reflecting type array waveguide grating based on a multiple-mode interferometer reflector. The reflecting type array waveguide grating comprises an input waveguide, a coupler, an array waveguide, a reflector and an output waveguide, wherein the input waveguide and the output waveguide are arranged on the same side of the coupler, and the array waveguide is arranged on the other side of the coupler. The array waveguide is composed of a plurality of nanometer wire waveguides, one end of each nanometer wire waveguide is connected with the coupler, the other end of each nanometer wire waveguide is connected with the reflector, and the reflector is a plane wave guide structure formed by a multi-mode interferometer and an annular waveguide. The reflecting type array waveguide grating is totally based on the plane light waveguide technology, the waveguide narrowest in width is a single-mode waveguide, and the requirements for manufacture accuracy of the waveguide is totally in accordance with that of the ordinary nanometer wire array waveguide grating. By adopting the reflector based on the multi-mode interferometer, the reflector is not sensitive in errors of the wavelength and the manufacture process. The array waveguide is flexible in structural design and can be distributed randomly according to requirements.

Description

technical field [0001] The invention relates to the field of planar optical waveguide integrated devices, in particular to a reflective arrayed waveguide grating. Background technique [0002] Based on planar optical waveguide technology, arrayed waveguide gratings have the advantages of small wavelength interval, large number of channels, uniform channel loss, small size, easy integration, and convenient mass production. It is considered to be the most suitable for large-capacity dense wavelength division multiplexing systems. key components. The miniaturization of arrayed waveguide gratings has been an important research topic. [0003] At present, the most widely used arrayed waveguide grating is based on silicon dioxide material system, with a typical size of 10cm 2 Magnitude. With the development of large-scale integrated devices, the miniaturization of devices is an inevitable trend. Increasing the refractive index difference between the waveguide core and cladding...

AI Technical Summary

Problems solved by technology

The manufacturing precision of this structure is very high, and the requirements for equipment and operators are high, so it is not suitable for industrial production

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