Multielement-doped strontium phosphate luminescent film, and preparation method and applications thereof
A strontium phosphate, multi-element technology, applied in electrical components, vacuum evaporation plating, ion implantation plating and other directions, can solve the problems of narrow wavelength range, poor film quality, etc., to achieve a wide luminous range, good film adhesion, easy-to-control effects
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[0017] Another purpose of the embodiment of the present invention is to provide a method for preparing the multi-element doped strontium phosphate thin film of the embodiment of the present invention, please refer to figure 1 , which includes the following steps:
[0018] S01: Weigh SrO powder, P 2 o 5 Powder, SnO 2 Powder, TiO 2 Powder and Eu 2 o 3 The powders are mixed, and the molar ratio of each component in the mixture is SrO:P 2 o 5 :SnO 2 :TiO 2 :Eu 2 o 3 (2-x-y-z): 1: x: y: z / 2, wherein, the value of x is 0.01 to 0.1, the value of y is 0.005 to 0.05, and the value of z is 0.01 to 0.04, and the mixture is sintered as the target material;
[0019] S02: Put the target material into the magnetron sputtering chamber, vacuumize, set the working pressure to 0.2Pa-4.5Pa, feed the mixed gas of inert gas and hydrogen, the flow rate of the mixed gas is 15sccm-30sccm, the substrate temperature The temperature is 350°C-750°C, the sputtering power is 30W-200W, and the m...
Embodiment 1
[0026] SrO powder with a purity of 99.99%, P 2 o 5 Powder, SnO 2 Powder, TiO 2 Powder and Eu 2 o 3 The powders are mixed, and the molar ratio of each component in the mixture is SrO:P 2 o 5 :SnO 2 :TiO 2 ;Eu 2 o 3 is 1.89:1:0.05:0.02:0.01, the mass of SrO powder is 195.8g, P 2 o 5 The mass of powder is 142g, SnO 2 The mass of the powder is 3g, TiO 2 The mass of the powder is 1.6g, Eu 2 o 3 The mass of the powder is 3.52g. After uniform mixing, high temperature sintering at 1200°C to form a Φ50×2mm ceramic target, and put the target into a vacuum cavity. The sapphire substrate was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, then etched with concentrated phosphoric acid, rinsed with deionized water, finally dried with high-temperature nitrogen, and placed in a vacuum chamber. The distance between the target and the substrate was set to 70mm. Use a mechanical pump and a molecular pump to pump the vacuum of the cavity t...
Embodiment 2
[0028] SrO powder with a purity of 99.99%, P 2 o 5 Powder, SnO 2 Powder, TiO 2 Powder and Eu 2 o 3 The powders are mixed, and the molar ratio of each component in the mixture is SrO:P 2 o 5 :SnO 2 :TiO 2 ;Eu 2 o 3 is 1.81:1:0.1:0.05:0.02, wherein the mass of SrO powder is 187.5g, P 2 o 5 The mass of powder is 142g, SnO 2 The mass of the powder is 6g, TiO 2 The mass of the powder is 4g, Eu 2 o 3 The mass of the powder is 7.04g. After uniform mixing, high temperature sintering at 1200°C to form a Φ50×2mm ceramic target, and put the target into a vacuum chamber. The sapphire substrate was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, then etched with concentrated phosphoric acid, rinsed with deionized water, finally dried with high-temperature nitrogen, and placed in a vacuum chamber. The distance between the target and the substrate was set to 70mm. Use a mechanical pump and a molecular pump to pump the vacuum of the ca...
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