High-resolution rolling-angle measuring device and measuring method

Abstract

The invention discloses a high-resolution rolling-angle measuring device, comprising a double-frequency laser, a 1 / 2 wave plate, a convex lens, a planar reflecting mirror and a pyramidal reflecting mirror, wherein a light splitting prism is arranged behind the optical axle of the double-frequency laser; the light-transmitting optical axle of the light splitting prism is provided with a 1 / 4 wave plate and a 5 / 5 light splitting mirror in sequence; the pyramidal reflecting mirror is arranged below the light-transmitting optical axle of the 5 / 5 light splitting mirror; and the 1 / 2 wave plate is arranged between the pyramidal reflecting mirror and the convex lens. The high-resolution rolling-angle measuring device disclosed by the invention has the advantages that the 1 / 2 wave plate is adopted as a detecting element for measuring the rolling angle, is positioned between the pyramidal reflecting mirror and the convex lens, and forms an internal multi-reflection cavity with the planar reflecting mirror on the back focal plane of the convex lens; the information of the rolling angle is modulated into phase change of polarized light by the 1 / 2 wave plate, so that the problem that by using the traditional laser interference method, the rolling angle in the plane vertical to the direction of a laser beam is difficult to measure is solved, and compared with the existing rolling-angle measuring method, the method disclosed by the invention has the advantage that the resolution is high.

Description

technical field [0001] The invention belongs to the field of photoelectric measurement of angles, and relates to a multiple-reflection polarized light phase modulation roll angle measurement device and a measurement method, in particular to a high-resolution roll angle measurement device and measurement method. Background technique [0002] Roll angle measurement has always restricted the improvement of precision machining such as precision guide rail motion pairs, especially the development of geometric accuracy detection, error traceability and compensation of CNC machine tools, thus affecting the overall machining and equipment manufacturing level. [0003] All mechanical rail kinematics have three rotational degrees of freedom (pitch, yaw, and roll errors). The measurement methods and technologies of pitch angle and deflection angle have been developed relatively maturely and have high resolution, such as dual-frequency laser interferometer method. The roll angle measur...

AI Technical Summary

Problems solved by technology

[0004] At present, the research and exploration of this problem can be summed up in the following aspects: First, the electronic level measurement based on the direction of gravity, which is similar to the traditional level, is based on the sensing of gravity by sensitive components to realize the measurement of the plane. The difference from the reference plane is used to complete the roll angle measurement; although it has the advantage of simplicity, it is powerless for the roll angle detection with the vertical axis as the axis

Second, the measurement is based on the position of the collimated laser based on the position sensitive detector (PSD). Calculate and complete the roll angle measurement, it can easily realize multi-dimensional measurement, but the measurement resolution is limited by the performance of PSD, it is difficult to improve, and it is easy to be affected by pitch angle and yaw angle

In addition, the application number is 01130893.1, and the patent titled "Roll Angle Measuring Method and Its Roll Angle Measuring Instrument" improves the optical path design on the basis of the polarized light phase method, and increases the sensitivity of the original method by 4 times on the basis of nonlinear enhancement. , but this method and device are difficult to improve its resolution

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