Photoresist stripper composition
A technology of stripping agent and composition, applied in optics, photomechanical equipment, photosensitive material processing, etc., can solve the problems of manufacturing cost and time increase, and achieve excellent stripping effect
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[0033] Examples 1 to 9 and Comparative Examples 1 to 21
[0034] The compositions of Examples 1 to 9 and Comparative Examples 1 to 21 were prepared by mixing the components shown in Table 1.
[0035] The mixing is carried out at room temperature for 1 hour or more to fully dissolve the solid corrosion inhibitor, and then filtered through a Teflon filter.
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[0036] Experimental example
[0037] The peeling ability and corrosion inhibition ability of the compositions obtained in Examples 1 to 9 and Comparative Examples 1 to 21 are evaluated as follows:
[0038] (1) Preparation of positive photoresist samples
[0039] A positive photoresist (THMR-iP 3300, TOK) is coated on a silicon wafer coated with silicon nitride, and then a photoresist pattern is formed through an exposure and development process. The pattern was transferred to the silicon nitride layer under the photoresist by dry etching to obtain a positive photoresist sample.
[0040] (2) Preparation of negative photoresist samples
[0041] Negative photoresist (PMER N-HC600, TOK) is coated on a silicon wafer, and then a photoresist pattern is formed through exposure, development and baking processes. Aluminum and titanium are sequentially spread on the silicon wafer to obtain a polished negative photoresist pattern.
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