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Multilayer nonon film in mems sensor

A pressure sensor, sacrificial layer technology, used in coatings, instruments, metal material coating processes, etc.

Active Publication Date: 2016-01-20
希奥检测有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Thus, designing an accurate MEMS sensor that requires the membrane to be exposed to harsh environments presents many problems where an effective barrier must be provided against the various materials present in the operating environment.

Method used

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  • Multilayer nonon film in mems sensor
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Embodiment Construction

[0016] Referring now to the drawings, in which like numerals refer to like elements or steps, broad aspects of various exemplary embodiments are disclosed.

[0017] MEMS pressure sensors rely on accurate measurement of deformation of a suspended membrane such as silicon, silicon germanium, silicon oxide or silicon nitride. They may have capacitive readout and are also known in the art. The cavity below the membrane can be sealed from the environment to have a known and stable reference pressure.

[0018] For example, a thin circular suspended SiN membrane can be employed as a capacitive manometer. The cavity under the SiN film can be sealed by using a PECVDSiN process. Pressure sensor performance can be primarily determined by the physical, mechanical and structural properties of the SiN film and the thickness of the plunger required to close the pores to close the cavity. The density and composition of SiN films can determine outgassing behavior and diffusion barrier prope...

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Abstract

Various embodiments relate to a MEMS pressure sensor and methods of fabricating the same. The MEMS pressure sensor includes: a lower electrode; a first insulating layer above the lower electrode; a second insulating layer above the first insulating layer and formed between the first insulating layer and the second insulating layer. a cavity; an upper electrode above the second insulating layer, wherein a portion of the cavity is between the upper electrode and the lower electrode; and a NONON pressure film above the upper electrode.

Description

technical field [0001] Various exemplary embodiments disclosed herein relate generally to multilayer NONON pressure membranes in MEMS sensors. Background technique [0002] Designing MEMS sensors to operate in harsh environments presents many problems. An example is a MEMS pressure sensor included in a rechargeable lithium-ion battery system. To ensure reliable operation, the parts that may be in direct contact with the liquid electrolyte inside the battery should effectively block the diffusion of water and lithium ions as well as other heavy metal ions typically present in these batteries (Mn 2+ 、Co 2+ , Fe 2+ / 3+ ). Especially the pressure membrane, which may be in direct contact with the liquid electrolyte, may be subject to potential water and lithium ion penetration since it may be soft and thin. If diffusion occurs in the pressure membrane, pressure sensor operation can be severely degraded. Thus, designing accurate MEMS sensors that require the membrane to be ex...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B3/00B81C1/00G01L9/12
CPCG01L9/0045G01L9/0073G01L19/0627
Inventor 威廉·弗雷德里克·亚德里亚内斯·贝什林
Owner 希奥检测有限公司