Monocrystal silicon wafer polishing process capable of obtaining high polishing rate
A polishing rate, silicon wafer technology, applied in surface polishing machine tools, grinding/polishing equipment, manufacturing tools, etc., can solve the problem that the removal rate is high, the removal rate cannot be too high, and the removal rate does not have much room for improvement, etc. solve problems, achieve the effect of meeting demand and reducing fixed costs
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[0014] Example: 6 inches (diameter 150mm) Czochralski silicification corrosion sheet, resistivity: 15-25Ω.cm, thickness: 625μm, quantity: 1024 pieces.
[0015] Processing equipment: There are wax placement machines and single-sided polishing machines.
[0016] Auxiliary materials: polishing wax, ceramic disc, rough polishing liquid, rough polishing cloth.
[0017] The processing process is as follows:
[0018] ① Send the monocrystalline silicon wafer to the loading table of the placement machine, the placement machine automatically sprays wax on the monocrystalline silicon wafer, and attaches it to the ceramic plate, and automatically transfers it to the polishing machine after the placement is completed Ready to polish.
[0019] ②Polishing by the polishing machine, followed by rough polishing, medium polishing, and fine polishing in three stages.
[0020] In the rough polishing stage, the American DuPont SR330 rough polishing liquid is used, and the dilution ratio of the r...
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