The application provides a kind of
verification equipment and
verification method for MEMS sensor, it is related to MEMS sensor
verification equipment technical field.
Verification equipment includes shell, test mechanism, driving mechanism and
signal output unit, the sealed cavity is formed in the inside of shell, test mechanism is located in sealed cavity and includes center axis and multiple two two opposite connecting arms, the inside of each connecting arm is formed with
gas pipeline,
gas pipeline is configured to controllably pass into gas, one end of each connecting arm is connected with center axis, the other end is equipped with test seat, test seat is used to install MEMS sensor, driving mechanism is connected to the center axis of test mechanism, driving mechanism is set to drive all connecting arms of test mechanism to rotate around center axis by preset angle,
signal output unit is connected with the MEMS sensor currently connected on test seat and is used to output the detection
signal of MEMS sensor.The verification equipment of the application can realize the verification of multiple types of
MEMS sensors by controlling different verification conditions, and the structure is simple, the cost is lower.