The invention discloses a single-
cell photoelectric detection
chip based on rectangular sleeve three-dimensional focusing and a preparation method thereof, and belongs to the technical field of single-
cell detection.The preparation method comprises the steps that 1, a
mask is formed; step 2, corroding an alignment mark; step 3,
spin coating of
photoresist, pre-baking, extensive
exposure, post-baking and hardening; step 4, spin-
coating a
photoresist, pre-baking, exposing, post-baking, not developing, cooling, then spin-
coating the
photoresist, pre-baking, exposing, post-baking, developing, and hardening to form a microfluidic mold; step 5, mixing the
prepolymer of the
polydimethylsiloxane polymer with a curing agent, and pouring the mixture on a mold after vacuum degassing; and step 6, aligning and bonding two pieces of PDMS with the same structural parameters, and then bonding the two pieces of PDMS with the
quartz substrate. According to the invention, high-sensitivity electrical detection and high-resolution
image detection can be carried out at the same time, the problem of imaging blurring caused by a three-dimensional focusing channel manufactured by 3D printing is solved, the
manufacturing efficiency is improved, and the manufacturing cost is reduced.