Method for recovering and reutilizing waste ammonia gas in LED (light-emitting diode) manufacturing through compression method

A compression method and ammonia gas technology, which is applied in the field of recycling waste ammonia gas in the recycling of LED manufacturing by compression method, to achieve significant energy-saving benefits and solve the effect of environmental protection

Active Publication Date: 2013-03-13
SUZHOU JINHONG GAS CO LTD
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  • Claims
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Problems solved by technology

[0003] The present invention proposes in order to solve this major environmental protection problem

Method used

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  • Method for recovering and reutilizing waste ammonia gas in LED (light-emitting diode) manufacturing through compression method
  • Method for recovering and reutilizing waste ammonia gas in LED (light-emitting diode) manufacturing through compression method

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Embodiment Construction

[0014] Below, refer to the attached figure 1 The block diagram of the production system shown illustrates the method of the invention in detail.

[0015] The waste ammonia gas comes from the MOCVD furnace exhaust gas main pipe 1, which is connected to the inlet of the buffer tank 2, and the gas outlet of the buffer tank 2 is connected to the inlet of the diaphragm compressor 3, and the ammonia gas content is sucked in the range of -0.05 ~ 0.01Mpa under a slight negative pressure of 10 % waste gas, the outlet of diaphragm compressor 3 is connected to the inlet of filter 4, and the waste ammonia gas is compressed to 1.3-1.6Mpa through the compressor.

[0016] The waste ammonia gas after pressurization passes through the filter 4 to filter out the metal ions in the waste ammonia gas. The outlet of the filter 4 is connected with the inlet of the condenser 5, and the compressed ammonia gas is condensed into liquid ammonia by cooling water at 20-40°C, and the condensed liquid ammon...

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Abstract

The invention discloses a method for recovering and reutilizing waste ammonia gas in LED (light-emitting diode) manufacturing through a compression method, which comprises the following steps of: performing negative-pressure intake on waste ammonia gas discharged in the LED manufacturing process with a diaphragm compressor, then performing pressurized compression, and condensing with cooling water to obtain liquid ammonia, thus achieving the purpose of recovering the waste ammonia gas; and then performing secondary rectification and separation on the cooled and recovered liquid ammonia to remove impurities, thus purifying the liquid ammonia, wherein the purified liquid ammonia can achieve ultra pure ammonia quality of 7N content and can be further used in the LED manufacturing circularly. The whole process is pollution-free, thereby thoroughly solving the problem that pollution is caused by the discharge of waste ammonia gas in the LED manufacturing process at present. Besides, the recovery investment is low, the recovery and purification cost is far lower than that of a method of manufacturing ultra pure ammonia for an LED from industrial liquid ammonia, and the LED manufacturing cost is greatly reduced.

Description

technical field [0001] The present invention relates to a method for recovering and reusing waste gas, in particular to a method for reusing waste ammonia gas in LED manufacturing by compression method, in particular to a method for negative pressure suction of waste ammonia gas in the LED manufacturing process with a diaphragm compressor, increasing Extruded, condensed into liquid ammonia with cooling water in the condenser, separated and extracted >99.99999% of the finished liquid ammonia by two rectifications, vaporized and then used in LED manufacturing MOCVD furnace. Background technique [0002] Ultra-pure ammonia is an important electronic gas in solar cells, LED light-emitting diodes, and semiconductor industries. Especially on MOCVD equipment, ammonia and trimethylgallium act on sapphire to form gallium nitride light-emitting diodes (LEDs) through vapor phase growth. LED light-emitting diodes are energy-saving products, which are being vigorously developed at ho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01C1/12
Inventor 金向华李荷庆
Owner SUZHOU JINHONG GAS CO LTD
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