Bulk conductive microchannel plate

Abstract

The invention relates to a bulk conductive microchannel plate, which belongs to the technical field of semiconductor electron multiplication devices. The bulk conductive microchannel plate comprises a platy glass base body; each of the edge parts of two side surfaces of the glass base body forms a solid annular glass side; a microchannel penetrating from one side surface of the glass base body to the other side surface of the glass base body is formed at an area positioned inside the annular glass side; a metal coating film layer is coated on both side surfaces of the glass base body at the area positioned inside the annular glass side; the bulk conductive microchannel plate is characterized in that the glass base body is semiconductor glass; the ratio of the diameter of the microchannel to the length of the microchannel is 1: 60 to 1: 80; and the electron gain of the microchannel is 104-106. The bulk conductive microchannel plate has the advantages of obtaining ideal electron gain, prolonging the service life, ensuring excellent signal gain effect and being excellent in electron gain and noise-signal ratio; and countermovement of positive ions when working is prevented.

Description

technical field [0001] The invention belongs to the technical field of semiconductor electron multiplier devices, in particular to a bulk conductance microchannel plate . Background technique [0002] Microchannel plate (English name: Microchannel Plate, abbreviated as: MCP) is a photomultiplier element made of glass fiber. After a certain voltage is applied to both sides of the microchannel plate, an axial electric field will be generated in the microchannel. , so that each electron or photon entering the channel, that is, the microchannel, collides with the channel wall and generates secondary electrons. The secondary electrons are continuously accelerated under the action of the axial electric field, and then collide with the channel wall to generate more new secondary electrons. Electronics, so that as the process is repeated, electronic gain is generated at the output to enhance the signal, and the weak electronic image or signal can be evenly amplified to more than ...

AI Technical Summary

Problems solved by technology

[0003] With regard to the material of the microchannel plate in the prior art: usually make with lead silicate glass (as CN101913765A " be used to make microchannel plate glass matrix Glass"), it has the following disadvantages: First, because the glass itself is an insulator and does not conduct electricity, it must be heated and reduced in hydrogen to form a conductive layer on the surface of the microchannel to transport electrons to supplement the surface of the channel wall. Electrons strike "secondary electrons" that are continuously emitted outward

[0004] As far as the physical mechanism of the microchannel plate in the prior art is concerned: due to the large noise and easy aging, the operating voltage cannot be too high (only 800-1000 volts), The gain is limited (the gain is 10 3 -10 4 ); if you try to increase the gain by increasing the voltage, on the one hand, the noise will increase and affect the signal, on the other hand Speeding up the aging of the microchannel plate shortens the working life

[0005] As far as the structure of the microchannel plate in the prior art is concerned: due to the lack of performance, the structure (and process) is not ideal

One of the reasons is that because it is made of lead silicate glass, if it is used for extreme ultraviolet single photon counting detectors such as the detection camera used to make the Chang'e satellite's detection of the ionosphere radiation signal of the earth's atmosphere, it needs to be processed in a vacuum. The micro-channel plate is heated and degassed for a long time, and the working channel of the micro-channel plate is washed with electrons several times to reduce noise and improve the signal-to-noise ratio of weak signals in the universe. In particular, it is necessary to combine at least two (two) micro-channel plates Superimposed use; the reason why two or more microchannel plates need to be superimposed is that the length-to-diameter ratio of a single microchannel is small, usually around 1:40 (the ratio of diameter to length is 1:40), making it difficult to Satisfies the requirement of a gain of 10 6 or higher for detection of extremely weak signals such as single photon counting devices, and practice has proved that two or more prior art microchannel plates are stacked and connected in series under voltage Work (in order to increase the gain) will have the following disadvantages: In addition to the high noise of the micro-channel plate itself, the signal electrons in the gap between the superimposed micro-channels will cause additional noise due to scattering, affecting signal reception and image acquisition clarity of

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