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Device and method for phase detection based on indirect type micromechanical microwave power sensor

A microwave power and sensor technology, applied in the measurement device, the phase angle between voltage and current, the instrument, etc., can solve the problems affecting the detection accuracy, etc., and achieve the effect of high linearity and large bandwidth

Inactive Publication Date: 2015-04-15
SOUTHEAST UNIV
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Problems solved by technology

Phase detection devices are widely used in antenna phase pattern testing and near-field diagnosis. The most widely used microwave phase detector is a Gilbert multiplier composed of field effect transistors. The disadvantages of this microwave phase sensor The use of active devices brings non-negligible noise and power consumption, which affects the accuracy of detection

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  • Device and method for phase detection based on indirect type micromechanical microwave power sensor
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  • Device and method for phase detection based on indirect type micromechanical microwave power sensor

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Embodiment Construction

[0020] The microwave phase detection device based on micro-electromechanical system (MEMS) technology of the present invention is a kind of microwave phase detection device that has used vector synthesis principle, and specific implementation scheme is as follows:

[0021] The system utilizes a direct micromachined microwave power sensor, a power combiner, an adjustable digital phase shifter, and a digital multimeter. Among them, the direct micromechanical microwave power sensor consists of the first layer of gold 1, the second layer of gold 2, silicon nitride film 3, gallium arsenide substrate, 4, thermocouple 5, pad 6, isolation capacitor 7, back hole 8. Composition.

[0022] will be compared with the signal under test V x A reference microwave signal of the same frequency as V ref Added to the input port 1 of the power combiner, the microwave signal V to be tested is x It is added to the input port of the adjustable digital phase shifter, and after a certain phase angle ...

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Abstract

The invention discloses a device and a method for phase detection based on a direct type micromechanical microwave power sensor. The device comprises an adjustable digital phase shifter (12), a power combiner (16), the direct type micromechanical microwave power sensor (19) and a digital multimeter (20), a reference microwave signal Vref is connected with a first input port (14) of the power combiner, a to-be-detected signal Vx is connected with an input port (11) of the adjustable digital phase shifter, an output port (13) of the adjustable digital phase shifter is connected with a second input port (15) of the power combiner, an output port (17) of the power combiner is connected with an input port (18) of the direct type micromechanical microwave power sensor, and back holes (8) on the direct type micromechanical microwave power sensor (19) are connected with the digital multimeter (20). The objective of accurate detection of microwave signal phase position is realized by utilizing the method of power after combining a measuring reference signal with the to-be-detected signal after phase shifting by the adjustable digital phase shifter.

Description

technical field [0001] The invention proposes a microwave phase detection device based on micro-electro-mechanical system (MEMS) technology, which belongs to the technical field of micro-electro-mechanical systems. Background technique [0002] In microwave technology research, microwave phase is an important parameter to characterize microwave signal characteristics. Phase detection devices are widely used in antenna phase pattern testing and near-field diagnosis. The most widely used microwave phase detector is a Gilbert multiplier composed of field effect transistors. The disadvantages of this microwave phase sensor The reason is that active devices are used, which brings non-negligible noise and power consumption, which affects the accuracy of detection. Since the end of the 20th century, people have used RF MEMS technology to realize a microwave phase detection system with low noise and low power consumption, and the present invention is a detection device based on thi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R25/04
Inventor 廖小平崔焱
Owner SOUTHEAST UNIV
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