Embedded non-volatile memory provided with P+ single polycrystalline architecture of selector transistor and free of light doped regions and preparation method of embedded non-volatile memory

Abstract

The invention relates to an embedded non-volatile memory provided with a P+ single polycrystalline architecture of a selector transistor, free of light doped regions and compatible with the CMOS (complementary metal oxide semiconductor) process and a preparation method of the embedded non-volatile memory. The embedded non-volatile memory comprises a semiconductor substrate and a memory cell, the memory cell comprises a PMOS (P-channel metal oxide semiconductor) transistor without the light doped regions, a control capacitor and the PMOS selector transistor, a gate dielectric layer is deposited on the surface of the semiconductor substrate, a floating gate electrode is arranged on the gate dielectric layer and covers and penetrates through the PMOS transistor without the light doped regions and the corresponding gate dielectric layer above the control capacitor, side protecting layers are deposited on two sides of the floating gate electrode, the PMOS transistor without the light doped regions comprises a first N-type region, a P-type source electrode region and a P-type drain electrode region, and the control capacitor comprises a second P-type region, a first P-type doped region and a second P-type doped region. The embedded non-volatile memory is compact in structure and compatible with the CMOS process, chip cost is reduced, and storage safety and reliability are improved.

Description

technical field [0001] The invention relates to a non-volatile memory and a preparation method thereof, in particular to an embedded non-volatile memory with a P+ single polycrystalline structure having a selector transistor, no lightly doped region and compatible with a CMOS process The invention and a preparation method thereof belong to the technical field of integrated circuits. Background technique [0002] For system-on-chip (SoC) applications, it is the integration of many functional blocks into an integrated circuit. The most common SoCs include a microprocessor or microcontroller, static random access memory (SRAM) modules, non-volatile memory, and logic blocks for various special functions. However, conventional non-volatile memory processes, which typically use stacked-gate or split-gate memory cells, are not compatible with conventional logic processes. [0003] Non-volatile memory (NVM) technology is different from traditional logic technology. The combinatio...

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Problems solved by technology

In this case, the proportion of the area occupied by the peripheral control circuit will be very large.

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