An Optical Sensing System Based on CMOS Processing Technology

Abstract

The invention provides an optical sensing system based on a complementary metal-oxide-semiconductor (CMOS) processing technique. The optical sensing system comprises a photo sensor integrally arranged on a CMOS circuit board and an operational circuit connected with the photo sensor, the photo sensor is formed by sensing units in an array, each sensing unit comprises a diffraction grating, an analytical grating and a PN junction array, a perpendicular distance between the analytical grating and the diffraction grating is m / n times of a taibao distance of the diffraction grating, the m and the n are both positive integers, dislocation shielding is formed by the analytical grating on the diffraction grating in certain distance, accordingly detection of angle information of plane light can be conveniently achieved, functional application of light sensing systems is expanded, and the optical sensing system is simple in process design and applicable to large-scale industrialization manufacture.

Description

【Technical field】 [0001] The invention relates to the fields of optical sensing and optical communication, in particular to an optical sensing system based on CMOS processing technology. 【Background technique】 [0002] In the past 30 years, the semiconductor industry has been developing continuously following Moore's Law. As one of the foundations of the semiconductor industry, the semiconductor process technology is also developing and improving day by day. Since the invention of CMOS devices in the mid-1960s, CMOS technology has begun to develop rapidly. CMOS technology is developed on the basis of PMOS and NMOS technology, and NMOS devices and PMOS devices are arranged on the same silicon substrate at the same time. For the production of CMOS integrated circuits, the most basic CMOS processes include: the silicon wafer process for producing the required type of substrate; the photolithography process for determining the processing area; the oxidation, deposition, diffusio...

AI Technical Summary

Problems solved by technology

However, it is difficult for existing optical sensors to simultaneously integrate complex optoelectronic properties into a single chip to simultaneously detect optical signal intensity information and angle information.

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