Preparation method of silicon carbide micro-powder used in silicon carbide crystal growth
A silicon carbide micropowder and crystal growth technology, applied in chemical instruments and methods, carbon compounds, inorganic chemistry, etc., can solve problems such as contamination, uneven particle size, waste, etc., achieve good particle size uniformity, and ensure product purity , Heating effect evenly
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Embodiment 1
[0019] (1) Mix 1200g of carbon powder with a purity of 99.999% and 2800g of silicon powder with a purity of 99.999%;
[0020] (2) The microwave frequency is selected as 900MHz, and the mixed carbon powder and silicon powder are put into the heating chamber, and argon gas is introduced as a protective gas after vacuuming;
[0021] (3) Heating, including the following steps:
[0022] a. Maintain the pressure in the heating chamber at 1KPa, heat the temperature in the heating chamber to 1500°C, and keep it for 0.5 hours;
[0023] b. Maintain the pressure in the heating chamber at 60KPa, heat the temperature in the heating chamber to 2100° C., and keep it for 1 hour.
[0024] After cooling, 4000 g of synthetic silicon carbide micropowder was obtained, with a purity of not less than 99.999%.
Embodiment 2
[0026] (1) Mix 1200g of carbon powder with a purity of 99.999% and 2800g of silicon powder with a purity of 99.999%;
[0027] (2) The microwave frequency is selected as 900MHz, and the mixed carbon powder and silicon powder are put into the heating chamber, and argon gas is introduced as a protective gas after vacuuming;
[0028] (3) Heating, including the following steps:
[0029] a. Maintain the pressure in the heating chamber at 1KPa, heat the temperature in the heating chamber to 1500°C, and keep it for 1 hour;
[0030] b. Maintain the pressure in the heating chamber at 60KPa, heat the temperature in the heating chamber to 2100°C, and keep it for 2 hours.
[0031] After cooling, 4000 g of synthetic silicon carbide micropowder was obtained, with a purity of not less than 99.999%.
Embodiment 3
[0033] (1) Mix 2400g of carbon powder with a purity of 99.9999% and 5600g of silicon powder with a purity of 99.999%;
[0034] (2) The microwave frequency is selected as 2000MHz, and the mixed carbon powder and silicon powder are put into the heating chamber, and argon gas is introduced as a protective gas after vacuuming;
[0035] (3) Heating, including the following steps:
[0036] a. Maintain the pressure in the heating chamber at 1KPa, heat the temperature in the heating chamber to 1500°C, and keep it for 2 hours;
[0037] b. Maintain the pressure in the heating chamber at 50KPa, heat the temperature in the heating chamber to 2100°C, and keep it for 3 hours.
[0038] After cooling, 8000 g of synthetic silicon carbide micropowder was obtained, with a purity of not less than 99.999%.
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