Multifunctional intelligent type laser speckle interference measuring device and method
A technology of laser speckle and interferometry, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of low intelligence and limited scope of application, achieve a wide range of applications, improve the accuracy of temperature measurement, The effect of eliminating spherical aberration
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[0066] An embodiment of the present invention is that a 0.6328um helium-neon laser irradiates a dime metal coin, and the temperature is respectively 20°C, 35°C, and 45°C, and the pressure scale is respectively 0, 5, and 10. The out-of-plane displacement is represented by △L, △L' and △L", respectively.
[0067] In the optical collimation system, the concave and convex surfaces of the negative concave-convex lens 1 and the double-convex lens 2 are coated with a 0.6328um anti-reflection film, and the material is ZF7;
[0068] The positive angle between the beam splitter and the horizontal optical path is 45°, the side close to the optical collimation system is coated with a 0.6328um transflective coating, and the side close to the total reflection mirror is coated with a 0.6328um anti-reflective coating;
[0069] The mirror is a flat mirror, and the side close to the optical path is coated with a 0.6328um high-reflection film;
[0070] In the sample testing system, the fixed pla...
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