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Monomer cooling trap and monomer evaporation device using same

A technology of cold capture and monomer, applied in the direction of lighting and heating equipment, mechanical equipment, electric solid devices, etc., can solve the problems of equipment productivity reduction, increase of maintenance times, and vacuum pump 40 pollution, etc., to achieve enhanced productivity and simplified Maintenance and repair work, effect of improving monomer recovery rate

Inactive Publication Date: 2013-05-22
SNU PRECISION CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008]However, the vacuum pump 40 installed on the flow path for exhausting unnecessary gas in the monomer chamber 20 causes the monomer to form a thin film in addition to exhausting the gas. m is discharged, so that the vacuum pump 40 has been polluted by the monomer in a short time
Severe contamination of the vacuum pump causes the operation of the deposition equipment to stop and the frequency of maintenance to be performed increases, thereby reducing the productivity of the equipment

Method used

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  • Monomer cooling trap and monomer evaporation device using same
  • Monomer cooling trap and monomer evaporation device using same
  • Monomer cooling trap and monomer evaporation device using same

Examples

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Embodiment Construction

[0031] An exemplary embodiment of a cold trap for adhering a monomer and a monomer deposition apparatus using the cold trap will be described in detail with reference to the accompanying drawings.

[0032] image 3 Is a diagram showing an example of a monomer deposition apparatus, Figure 4 Is a perspective view showing an example of a cold trap for adhering a monomer, Figure 5 Is shown Figure 4 A diagram of an example of a cold trap for adhering monomers, the cooling plate is removed from the cold trap, and Image 6 Is shown arranged in Figure 4 A diagram of an example of multiple cooling plates in a cold trap for adhering monomers.

[0033] Reference Figure 3 to Figure 6 The monomer deposition apparatus, which is an apparatus for depositing a monomer in a vapor state on a substrate, includes a main chamber 10, a monomer chamber 20, a gate 30, and a cold trap 100 for adhering the monomer. A case in which the monomer m in a vapor state of the material forming the organic layer 3...

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PUM

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Abstract

The present invention pertains to a monomer cooling trap, which is mounted on a path through which gas and monomers generated in the process of evaporation are discharged to the outside, and characterized by comprising: a case; a suction hole for sucking the gas and the monomers; a cooling plate received in the case and having a path formed inside so that refrigerant may flow therethrough, a surface to which the monomers are attached, and a through hole that is formed to penetrate upper and lower surfaces; and an exhaust hole for discharging gas from the inside of the case.

Description

Technical field [0001] The present invention relates to a cold trap for adhering monomers and a monomer deposition device using the cold trap. More specifically, the present invention relates to a device capable of recovering gas discharged to the outside of a chamber. It is used in a cold trap to adhere monomer and a monomer deposition device using the cold trap. Background technique [0002] An organic light emitting diode (OLED) display device is a next-generation display device characterized by its own light emission, and is superior to a liquid crystal display device (LCD) in terms of viewing angle, contrast, reaction rate, and power consumption. [0003] The OLED display device includes OLEDs connected between scan lines and data lines in a matrix to form pixels. The OLED includes an anode electrode, a cathode electrode, and an organic thin film formed between the anode electrode and the cathode electrode. The organic thin film includes a hole transport layer, an organic lig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D8/00C23C14/12H01L51/56
CPCH01L51/56C23C14/12B05D1/62C23C14/56B01D8/00B05D1/60H10K71/00
Inventor 尹亨硕南宫晟泰金壮美朴一濬
Owner SNU PRECISION CO LTD