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A kind of preparation method and growth equipment of magnesium fluoride crystal

A technology of magnesium fluoride and crystals, which is applied in the field of preparation of magnesium fluoride crystals, can solve the problems that crystals cannot meet the requirements of use, and achieve the effects of excellent crystal optical quality, elimination of fatal effects, and high transmittance

Active Publication Date: 2015-09-16
北京雷生强式科技有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of this invention is to provide a preparation method and growth equipment for magnesium fluoride crystals, which overcome the MgF growth of the above-mentioned crucible descending method. 2 The problem that the crystal cannot meet the use requirements in the vacuum ultraviolet band

Method used

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  • A kind of preparation method and growth equipment of magnesium fluoride crystal
  • A kind of preparation method and growth equipment of magnesium fluoride crystal
  • A kind of preparation method and growth equipment of magnesium fluoride crystal

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Accurately weigh 800g of magnesium fluoride powder as the crystal raw material, and the size of the iridium crucible is ф100×90mm. Raw materials are vacuum protected to minimize the contact between raw materials and air. Put the raw materials into the crucible in the crystal growth furnace, install the seed crystal and debug the pulling equipment, flow nitrogen gas in the furnace, start the crystal growth software, set the relevant parameters, the pulling speed of the pulling motor is 1.1mm / h, the rotating motor The rotation speed is 8r / min, and the nitrogen flow rate is 0.4m 3 / h, the number of times of salvage is 5 times, and the temperature of the seed crystal is 1120 ℃. Start to heat up and melt the raw materials, salvage the oxyfluoride, and lower the seed crystal. When the crystal grows to a suitable size, close the program, and the motor will enter manual control. Adjust the speed of the motor to quickly remove the crystal from the liquid surface. After an hour...

Embodiment 2

[0050] Accurately weigh 900g of magnesium fluoride powder as the crystal raw material, and the size of the iridium crucible is ф100×90mm. Raw materials are vacuum protected to minimize the contact between raw materials and air. Put the raw materials into the crucible in the crystal growth furnace, install the seed crystal and debug the pulling equipment, flow nitrogen gas in the furnace, start the crystal growth software, set the relevant parameters, the pulling speed of the pulling motor is 1.1mm / h, the rotating motor The rotation speed is 8r / min, and the nitrogen flow rate is 0.4m 3 / h, the number of times of salvage is 5 times, and the temperature of the seed crystal is 1120 ℃. Start to heat up and melt the raw materials, salvage the oxyfluoride, and lower the seed crystal. When the crystal grows to a suitable size, close the program, and the motor will enter manual control. Adjust the speed of the motor to quickly remove the crystal from the liquid surface. After an hour...

Embodiment 3

[0053] Accurately weigh 1000g of magnesium fluoride powder as the crystal raw material, and the size of the iridium crucible is ф100×90mm. Raw materials are vacuum protected to minimize the contact between raw materials and air. Put the raw materials into the crucible in the crystal growth furnace, install the seed crystal and debug the pulling equipment, flow nitrogen gas in the furnace, start the crystal growth software, set the relevant parameters, the pulling speed of the pulling motor is 1.1mm / h, the rotating motor The rotation speed is 8r / min, and the nitrogen flow rate is 0.4m 3 / h, the number of times of salvage is 5 times, and the temperature of the seed crystal is 1120 ℃. Start to heat up and melt the raw materials, salvage the oxyfluoride, and lower the seed crystal. When the crystal grows to a suitable size, close the program, and the motor will enter manual control. Adjust the speed of the motor to quickly remove the crystal from the liquid surface. After an hou...

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Abstract

The invention relates to a preparation method and growth equipment of a magnesium fluoride crystal. The growth equipment comprises a furnace cavity, wherein a gas inlet through hole and a gas outlet through hole are respectively arranged above and below the furnace cavity; and an opening used for dredging impurities generated through crystal growth is arranged above the furnace cavity. The preparation method of the magnesium fluoride crystal comprises the following steps of: setting parameters, and introducing a flowing inert gas into the furnace cavity in the preparation process of the magnesium fluoride crystal; starting to increase the temperature to melt magnesium fluoride powder, after the magnesium fluoride powder is completely melted to form a fusant, dredging oxyfluoride, and placing seed crystals to obtain the grown magnesium fluoride crystal. The prepared magnesium fluoride crystal is excellent in optical quality; and the transmittance of @193 nm is not less than 89%.

Description

technical field [0001] The invention relates to the field of crystal crystallization technology, in particular to a preparation method and growth equipment of magnesium fluoride crystals. Background technique [0002] Optical windows are crucial optical components in all optical instrument systems, and almost all optical systems require their window materials to have as low a background absorption loss as possible in their light transmission bands, in order to improve the efficiency and sensitivity of the entire optical system . [0003] The only material that can be used in the vacuum ultraviolet window is MgF 2 , CaF 2 , LiF and a few highly transparent fluoride crystals in the vacuum ultraviolet band, among them, MgF 2 The highest transmittance in the vacuum ultraviolet band; MgF 2 The lowest refractive index, only the refractive index as small as possible, it is possible to minimize the reflection loss of the incident light; MgF 2 The hardness is the highest, and th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/00C30B29/12
Inventor 杨国利崔艳军张月娟马晓明庞才印毕海
Owner 北京雷生强式科技有限责任公司
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