Apparatus for organic film formation and method for organic film formation

An organic film and film-forming technology, which is applied in lighting devices, optomechanical equipment, and components used for photomechanical processing, etc., can solve the problems of re-evaporation of organic materials and difficulty in film formation, and achieve the effect of preventing re-evaporation

Active Publication Date: 2013-06-12
ULVAC INC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, when the film-forming object is moved while depositing and solidifying the organic material, there is a problem that the temperature of the film-forming object fluctu

Method used

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  • Apparatus for organic film formation and method for organic film formation
  • Apparatus for organic film formation and method for organic film formation
  • Apparatus for organic film formation and method for organic film formation

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[0025] 1, reference numeral 10 is an organic film forming apparatus of the present invention, and reference numeral 5 represents a film formation object on which an organic film is formed on the surface by the organic film forming apparatus 10.

[0026] The organic film forming apparatus 10 includes: a vacuum chamber 11 to which a vacuum pump 12 is connected, a substrate stage 14 on which a film object 5 is arranged, and a photoreactive material in either or both of the form of a gas or a micro droplet The raw material supply device 18 of the shower plate 15 is supplied together with the carrier gas.

[0027] The interior of the shower plate 15 is hollow, and the photoreactive material supplied from the raw material supply device 18 together with the carrier gas is introduced into the hollow portion. The shower plate 15 is provided with a plurality of ejection ports 16 connected to the hollow portion on one surface thereof, and the photoreactive material is ejected from the ejectio...

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Abstract

Provided are an apparatus for organic film formation and a method for organic film formation, according to which an organic material is adhered to a film-formation target, and the organic material is then hardened to form an organic film while the film-formation target is maintained in a stationary state. An organic film of a light-reactive material is formed as follows: a film-formation target (5) is disposed on a substrate stage (14) disposed in a vacuum chamber (11), a mask (31) is disposed in contact with the surface of the film-formation target (5), the film-formation target (5) is cooled, a light-reactive material which hardens when irradiated with light from above the mask (31) is emitted while the inside of the vacuum chamber (11) is evacuated, the light-reactive material attaches to the surface of the film-formation target (5) exposed at the bottom surface of an opening (34) in the mask (31), a liquid film of the light-reactive material is formed in the attached portion, the evacuation of the vacuum chamber (11) is halted and the liquid film is moved on the mask (31) while light is irradiated from a light irradiation device (24), and the liquid film hardens to form an organic film of the light-reactive material.

Description

technical field [0001] The present invention relates to an organic film forming device and an organic film forming method, and particularly relates to the technical field of forming an organic film by solidifying an organic material after adhering to an object to be filmed. Background technique [0002] Conventionally, in the manufacturing process of an organic EL element, after forming a lower electrode layer, an organic light emitting layer, and an upper electrode layer sequentially on a substrate, a sealing layer is formed as a protective film in order to protect the surface and prevent the intrusion of moisture. [0003] In Patent Document 1, it is proposed that the sealing layer of the organic EL element is formed as a laminated film in which at least a barrier layer, an organic layer, and a barrier layer are sequentially formed. [0004] In addition, in Patent Document 2, it is proposed to have a treatment chamber for depositing an organic material of an organic film, ...

Claims

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Application Information

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IPC IPC(8): C23C14/12C23C14/58H01L51/50H05B33/10
CPCG03F1/50G03F7/2014H05B33/10H10K71/164H10K71/166H10K71/40H10K71/421H10K71/00
Inventor 内田一也大森大辅宫内淳
Owner ULVAC INC
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