Super junction lateral double-diffused metal-oxide semiconductor (LDMOS) device
A device, N-type technology, applied in the field of high-voltage superjunction power semiconductor devices, can solve the problem of not completely improving the electric field distribution of the device, the contradiction between the device withstand voltage and on-resistance, etc., to achieve uniform electric field distribution in the body, improve electric field distribution, The effect of improving the longitudinal pressure resistance
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[0019] The present invention optimizes the specific on-resistance and breakdown voltage of the device by introducing heavily doped N+ islands 2 in the substrate 1 and introducing a P-type electric field shielding layer 3 between the substrate and the active area.
[0020] figure 2 Shown is a super junction LDMOS device of the present invention, including a P-type substrate 1, an N-type buffer zone 4, a P-type strip 5, an N-type strip 6, a P-type body region 7, and a P-type heavily doped body contact region 8. , N-type heavily doped source region 9, metal source electrode 10, polysilicon gate electrode 11, gate oxide layer 12, metal drain electrode 13, N-type heavily doped drain region 14; the P-type strip 5 and N-type strip 6 Parallel to the device lateral direction, a drift region of the super junction structure is formed; the N-type buffer zone 4 is located between the drift region of the super junction structure and the P-type substrate 1; the N-type heavily doped drain region...
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