The embodiment of the invention provides a
trench MOSFET (
Metal-
Oxide-
Semiconductor Field Effect Transistor) device, a manufacturing method and a
chip. The device comprises a first section region, a second section region and a third section region which are alternately arranged along a first direction, each of the first section region, the second section region and the third section region comprises an N-type substrate, an epitaxial layer, a first groove, an
oxide layer, a first N region, a P well region, an N + region, a second groove, a grid
electrode and a source
electrode; the epitaxial layer is arranged on one side of the N-type substrate; the first N region is located below the two sides of the first groove; the N + regions are located on the two sides of the first groove. The P well region is connected below the N + region; the second groove is located at the bottom of the first groove; the P regions, located at the bottom and corners of the second groove, of the first section region play a role in
electric field shielding, and the P regions, located at the bottom of the first groove, of the third section region play a role in
electric field shielding, so that device damage caused by a relatively strong
electric field generated at the corners of the grooves is avoided, and the reliability of the device is improved.