Reactor and method for realizing chlorosilane synthesis

A technology for reactors and chlorosilanes, applied in the field of reactors for the synthesis of chlorosilanes, can solve the problems of high energy consumption, easy pollution, complex structure, etc., and achieve the effects of temperature control, easy operation, and investment saving

Active Publication Date: 2016-08-17
储晞
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0013] The purpose of the present invention is to propose a reactor for realizing the synthesis of chlorosilanes, which is used for the synthesis of chlorosilanes, for the complex structure, high energy consumption and easy pollution of the existing reactors for the disproportionation and antiproportionation of chlorosilanes. Disproportionation and anti-disproportionation reactions, the equipment has the advantages of simple structure, low energy consumption and no pollution

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  • Reactor and method for realizing chlorosilane synthesis
  • Reactor and method for realizing chlorosilane synthesis
  • Reactor and method for realizing chlorosilane synthesis

Examples

Experimental program
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Embodiment 1

[0087] figure 1 The reaction flow chart of the synthesis of trichlorosilane from dichlorodihydrogensilane and silicon tetrachloride provided in Example 1; figure 2 It is an enlarged view of the reactor chamber in Example 1.

[0088] This embodiment discloses a reactor for realizing the synthesis of chlorosilanes, the specific structure is as follows figure 1 with figure 2As shown, the reactor includes a reactor cavity 006, and the reactor cavity 006 is provided with a catalyst charging port 103, a catalyst charging port 108, a raw material feeding port 110, and a product discharging port 101;

[0089] A heat exchange device is arranged in the reactor cavity 006, and the heat exchange medium outlet 107 and the heat exchange medium inlet 104 of the heat exchange device are both arranged on the reactor cavity 006, and the heat exchange medium outlet 107 of the heat exchange device is connected with the raw material inlet The feed port 110 is connected.

[0090] The upper an...

Embodiment 2

[0103] image 3 It is an enlarged view of the reactor chamber of Example 2.

[0104] The invention discloses a reactor for realizing the synthesis of chlorosilanes. The difference from Example 1 is that the heat exchange device used in this example is as follows: image 3 As shown: the heat exchange device is a plurality of parallel heat exchange tubes arranged along the length direction of the reactor cavity. A double tube sheet structure is adopted between the end of the heat exchange tube and the reactor cavity, and the double tube sheet structure makes it difficult for the fluid in the heat exchange tube and the fluid in the reactor cavity to mix.

[0105] Refer to Example 1 for the basic process of the deproportionation reaction of chlorosilanes in this example.

Embodiment 3

[0107] Figure 4 Reaction scheme provided for Example 3.

[0108] This embodiment opens a kind of reactor that realizes the synthesis of chlorosilane, and the structural diagram of this reactor is as follows Figure 4 As shown, it includes a reactor cavity, a raw material delivery pipeline 401 for delivering raw materials, and a product output pipeline 402 for delivering products. The reactor cavity is provided with a catalyst charging port, a catalyst charging port, a second A feed port 405 and a second feed port 406;

[0109] The reactor cavity is provided with a built-in or an external preheating mechanism;

[0110] A first temperature sensing mechanism 415 is provided at one end of the reactor cavity close to the first feed port 405; a second temperature sensing mechanism 416 is provided at one end of the reactor cavity close to the second feed port 406 ;

[0111] The first feed inlet 405, the raw material delivery pipeline 401 and the product output pipeline 402 are c...

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Abstract

The invention provides a reactor and a method for realizing the synthesis of chlorosilane. The reactor for realizing the synthesis of chlorosilane comprises a reactor cavity, the reactor cavity is provided with a catalyst feed inlet, a catalyst loading inlet, a catalyst discharge outlet, a catalyst orifice, a raw material feed inlet and a product discharge outlet; the reactor cavity is provided with an internal or external preheating mechanism; and a heat exchange device is arranged on and / or in the reactor cavity, a heat exchange medium outlet and a heat exchange medium inlet of the heat exchange device are both arranged on the reactor cavity, and the heat exchange medium outlet is communicated with the raw material feed inlet. The invention also discloses a method for carrying out chlorosilane disproportionation and inverse disproportionation synthesis by using the reactor. The reactor and method for realizing synthesis of chlorosilane disclosed by the invention overcome various defects in the prior art, and realize the efficient, energy-saving, long-term, stable, safe and reliable production of chlorosilane.

Description

technical field [0001] The invention relates to chlorosilane synthesis technology, in particular to a reactor and method for realizing chlorosilane synthesis. Background technique [0002] The modified Siemens method is the most commonly used technology in the industrial production of polysilicon. It reacts industrial silicon powder with HCl and processes it into SiHCl 3 , and let SiHCl 3 in H 2 Polysilicon is obtained by reduction deposition in a reduction furnace in an atmosphere. In the process of obtaining polysilicon products, the tail gas (H 2 ), SiHCl 3 、SiCl 4 、SiH 2 Cl 2 HCl and HCl need to be separated before recycling, so the separation and recycling of emissions is also an important process of the process. [0003] A large amount of by-products such as silicon tetrachloride and dichlorodihydrosilane will be produced in the tail gas and in the emission of the reduction furnace. Among them, dichlorodihydrosilane is a highly corrosive and toxic gas with a b...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/107
Inventor 储晞
Owner 储晞
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