Laser-induced breakdown spectroscopy analysis system and laser-induced breakdown spectroscopy analysis method

Abstract

The invention provides a laser-induced breakdown spectroscopy analysis system which comprises a control unit, a pulse laser, a beam splitter, a movable positioning platform, a spectrum collecting unit, a spectrograph and a data processing system, wherein the beam splitter, the movable positioning platform, the spectrum collecting unit, the spectrograph and the data processing system are sequentially arranged along the emitted direction of pulse lasers; the beam splitter splits the emitted light pulse of the pulsed laser into a main light path and a sampling light path; the main light path is provided with a laser beam expanding-collimating and focusing optical system and a sample positioning unit which forms a feedback control with the movable positioning platform; the sampling light path is provided with a pulse laser energy measurement module and a pulse trigger delay unit; the control unit outputs multiple control signals; the control signal output ends of the control unit are respectively correspondingly connected to the sample positioning unit; and the data output end of the spectrograph is connected to the data processing system.

Description

technical field [0001] The present invention relates to a device for qualitative and quantitative analysis of constituent material elements. Background technique [0002] With the rapid development of laser technology, people's demand for the understanding of trace elements in substances is constantly increasing. New techniques for atomic emission spectroscopy analysis of interactions. By spectroscopically and detecting the plasma spectral signal generated by focusing the low-energy narrow-pulse pulse laser on the surface of the sample, the information of the elements in the sample to be tested is obtained, and finally the qualitative and quantitative elements of the sample are calculated. This technology has the following advantages: it does not have high requirements on the sample surface, is not limited by material type, surface morphology, state, conductivity, etc., generally does not require pretreatment, has low sample loss, rapid response, and can realize simultaneou...

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Problems solved by technology

[0003] But so far, this technology is still at the level of theoretical design, and the LIBS technology has not been practiced in China. There may be research and development devices abroad, but it can only achieve qualitative judgment and does not have the function of quantitative analysis.

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