Seasoning control method

A control method and warm-up technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of undisclosed equipment warm-up control methods, and achieve the effects of improving equipment utilization and saving manpower

Active Publication Date: 2013-07-10
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Abstract
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Problems solved by technology

[0006] It can be seen that there is no fully automatic method for controlling t

Method used

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Example Embodiment

[0029] The present invention is a control method of a real-time dispatching system for semiconductor manufacturing industry, and more specifically, a method for controlling equipment warm-up in a real-time dispatching system of semiconductor manufacturing industry.

[0030] The method of the invention is implemented based on a semiconductor manufacturing real-time dispatching system, an automation system, a manufacturing execution system, a machine monitoring system and a handling system.

[0031] figure 1 It is a schematic diagram of the workflow of each system in the method embodiment of the present invention.

[0032] Such as figure 1 As shown,

[0033] Establish a database including warm-up type information, warm-up condition information and warm-up control piece information.

[0034] Among them, there are three types of warm-ups in the database, namely:

[0035] (1) Idle season of wafer processing equipment;

[0036] (2) The recipe change season of wafer processing equipment;

[0037]...

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Abstract

The invention relates to a seasoning control method. The method comprises the steps of setting at least one season type of wafer machining equipment according to requirements of technological operation before the wafer machining equipment is used for technological operation of a wafer, and setting a season condition and a season lot type corresponding to each season type at the same time; acquiring detection data information of the wafer machining equipment in real time; comparing detection data with each season condition to judge the season type needed by season operation of the wafer machining equipment, dispatching a corresponding season lot to the wafer machining equipment according to a season lot type corresponding to the season type, and continuing to use the wafer machining equipment to perform the technological operation on the wafer after the season operation is carried out on the wafer machining equipment; and carrying out the technological operation on the wafer directly with the wafer machining equipment if no detection data meet the season conditions. By means of the seasoning control method, human intervention is not needed in the whole seasoning process, and the utilizing rate of equipment is effectively improved.

Description

technical field [0001] The invention relates to a dispatching system for semiconductor manufacturing industry, in particular to an equipment warm-up control method in the dispatching system for semiconductor manufacturing industry. Background technique [0002] In order to improve the yield rate during the wafer manufacturing process, it is usually necessary to warm up the equipment. The warm-up operation is usually when the equipment is idle for a long time (Idel) or the process menu of two adjacent batches changes (Recipe Change ), or after a certain number of products have been produced continuously, it is also necessary to warm up the equipment. [0003] At present, the production lines of semiconductor devices are basically fully automatic. Therefore, it is almost impossible to rely on the operator to perform manual warm-up on such a fully automatic production line. This is mainly because: (1) For the calculation of the warm-up operation The workload is huge, and manua...

Claims

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Application Information

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IPC IPC(8): H01L21/67
Inventor 陈智文
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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