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Improved humidity sensor based on polyimide

A humidity sensor, polyimide technology, applied in the field of sensors, can solve the problems of long response time and limited contact area

Inactive Publication Date: 2013-07-17
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Traditional capacitive humidity sensors are generally composed of two layers of electrodes and a layer of polymer materials. As shown in the figure, this sensor has the disadvantages of limited contact area with the surrounding environment and long response time.

Method used

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  • Improved humidity sensor based on polyimide
  • Improved humidity sensor based on polyimide
  • Improved humidity sensor based on polyimide

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Example 1, see figure 1 :

[0029] (a) for preparing to make the silicon chip 1 of humidity sensor;

[0030] (b) make SiO for the front side of silicon wafer 1 described in (a) 2 Layer 2;

[0031] (c) for sputtering the metal seed layer and electroplating the capacitor electrode plate 3, typical electrode plate materials include Au etc.;

[0032] (d) for coating polyimide 4, make capacitor dielectric material;

[0033] (e) for making cavity 5 in polyimide, and curing;

[0034] The three-dimensional image of the fabricated humidity sensor is as follows: figure 2 shown.

Embodiment 2

[0036] The shape of the cavity is as image 3 As shown, single or multiple cavities are fabricated in the polyimide between the electrode plates along the direction of the electrode plates. The number of multiple cavities is 2 or more. Under the condition of meeting the requirements of lithographic precision, the more the number of cavities and the smaller the opening of the cavities, the better the performance of the sensor should be.

[0037] Except that the cavity manufacturing method is different from Embodiment 1, the rest of the steps and process parameters are completely the same as those in Embodiment 1.

Embodiment 3

[0039] The cavity as Figure 4 As shown, multiple cavities were fabricated in the polyimide between the electrode plates perpendicular to the direction of the electrode plates. The number of cavities is 2 or more. Under the condition of meeting the requirements of lithographic precision, the more the number of cavities and the smaller the opening of the cavities, the better the performance of the sensor should be.

[0040] Except that the manufacturing method of the cavity is different from that in the first embodiment, the rest of the steps and process parameters are completely the same as those in the first embodiment.

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Abstract

The invention relates to an improved humidity sensor based on polyimide. The humidity sensor is characterized in that a polyimide film is coated between electrode plates and used as a humidity sensitive material; and then a cavity is made in a polyimide layer by using lithography technology. The sensor increases contact area between the sensor and surrounding environment, and has the characteristic of fast response time.

Description

technical field [0001] The invention relates to an improved polyimide-based humidity sensor, which belongs to the field of sensors Background technique [0002] There are two main types of humidity sensors: resistive and capacitive. [0003] The characteristic of the resistive humidity sensor is that a film made of moisture-sensitive material is covered on the substrate. When the water vapor in the air is adsorbed on the moisture-sensitive film, the resistivity and resistance value of the element will change. Using this characteristic to measure humidity. [0004] Capacitive humidity sensors are generally made of polymer film capacitors. Commonly used polymer materials include polystyrene, polyimide, and cellulose acetate. When the ambient humidity changes, the dielectric constant of the humidity-sensitive capacitor changes, so that the capacitance also changes, and the capacitance change is proportional to the relative humidity. [0005] The performance indicators of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22
Inventor 宁文果罗乐徐高卫李珩
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI