Asymmetrical phase-adjustable Mach-Zehnder interferometer and preparation method thereof

An interferometer and asymmetric technology, applied in the coupling of optical waveguides, etc., can solve the problems of optical path difference between the two arms, optical sensing, communication system reconfiguration, constant output characteristics, etc., and achieve low cost, Overcoming the instability problem, the effect of finely adjustable phase

Active Publication Date: 2015-03-25
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the PLC-type MZI generally has a fixed optical path difference between the two arms, which limits its output characteristics to be fixed, which is not conducive to the changeable reconstruction of optical sensing and communication systems.

Method used

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  • Asymmetrical phase-adjustable Mach-Zehnder interferometer and preparation method thereof
  • Asymmetrical phase-adjustable Mach-Zehnder interferometer and preparation method thereof
  • Asymmetrical phase-adjustable Mach-Zehnder interferometer and preparation method thereof

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preparation example Construction

[0041] The preparation method of the above-mentioned asymmetric phase-tunable Mach-Zehnder interferometer comprises the following steps:

[0042] Step 10): Take a silicon substrate, and clean the silicon wafer by wet chemical method. A silicon dioxide buffer layer with a thickness of 15 μm to 20 μm is prepared on the silicon substrate by a thermal oxidation method. Using the plasma-enhanced chemical vapor deposition method, the concentration of silane and nitrogen was 5% S i h 4 :N 2 , the temperature is 250°C-400°C, silicon dioxide is doped with germanium dioxide to obtain a waveguide layer 9 with a thickness of 8 μm, and GeH with a gas concentration of 10% is used 4 : Ar, form a waveguide layer with a thickness of 8 μm, and the difference between the refractive index of the waveguide layer and the refractive index of the silica buffer layer is 0.4%.

[0043] Step 20): On the waveguide layer, use photolithography and etching processes to prepare the PLC chip part of the a...

Embodiment

[0051] The preparation method of the asymmetric phase-tunable Mach-Zehnder interferometer is introduced below, so as to describe the above preparation method in more detail.

[0052] Step 10): making the silicon dioxide buffer layer 8 and the waveguide 9 . refer to figure 2 As shown, it includes step 101), step 102) and step 103).

[0053] Step 101) Take a silicon substrate, clean the silicon wafer, that is, the substrate 7, by wet chemical method, and remove the dirt on the surface; then, after ultrasonic cleaning and drying with deionized water, the cleaning of the silicon wafer is completed;

[0054] Step 102) Prepare the silica buffer layer 8. There are many methods for preparing the silica buffer layer 8, such as chemical vapor deposition (CVD), flame hydrolysis (FHD), sol-gel method (Sol-Gel), Thermal oxidation (TO), etc. Since the thermal oxidation method can oxidize hundreds of silicon wafers at the same time, it has higher efficiency in actual production, and can ...

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Abstract

The invention discloses an asymmetrical phase-adjustable Mach-Zehnder interferometer and a preparation method of the asymmetrical phase-adjustable Mach-Zehnder interferometer. The interferometer comprises a planer light wave light path PLC chip and an external connection light guide arm, wherein the planer light wave light path PLC chip comprises a silicon substrate, a silicon dioxide buffering layer is arranged on the silicon substrate, a wave guide layer is arranged on the silicon dioxide buffering layer, a coverage layer is arranged on the wave guide layer, and the wave guide layer comprises an input level 3dB coupler, two open arms, a length fixing arm and an output level 3dB coupler. The preparation method of the asymmetrical phase-adjustable Mach-Zehnder interferometer comprises the following steps that the buffering layer is prepared on the silicon substrate, the wave guide layer is prepared on the buffering layer, photoetching and etching are carried out on the wave guide layer, the PLC chip part of the asymmetrical phase-adjustable Mach-Zehnder interferometer is prepared, slicing and grinding are carried out, and a single mode fiber array is coupled with the open arms of the PLC chip and then is coupled with the input end and the output end of the interferometer. The asymmetrical phase-adjustable Mach-Zehnder interferometer and the preparation method of the asymmetrical phase-adjustable Mach-Zehnder interferometer achieve fine adjustment of phases, are compact and simple in structure, and high in stability.

Description

technical field [0001] The invention belongs to the technical field of integrated photonic devices, and relates to an asymmetric phase adjustable Mach-Zehnder interferometer and a preparation method thereof. Background technique [0002] The Mach-Zehnder Interferometer (full name in English: Mach-Zehnder Interferometer, abbreviated in the text: MZI) as a phase detection optical path structure has been widely used in optical sensing and communication systems. In optical fiber communication, MZI is usually used as optical fiber wavelength division multiplexer, optical modulator, optical switch and wavelength converter, etc.; in optical sensing system, due to its high sensitivity, MZI can be used to measure current, electromagnetic field, temperature, Weak physical quantities such as pressure. [0003] Mach-Zehnder interferometers are mainly divided into three categories: the first category is the traditional MZI based on separate components; the second category is the traditi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/28
Inventor 孙小菡蒋卫锋
Owner SOUTHEAST UNIV
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