A kind of reconfigurable comb filter based on cascade Mach-Zehnder interferometer and its preparation method

A comb filter and interferometer technology, applied in the direction of instruments, light guides, optics, etc., can solve the problems of optical path difference, fixed output characteristics, unfavorable light sensing, etc., and achieve high thermal stability, low nonlinearity, The effect of low loss

Active Publication Date: 2015-09-16
SOUTHEAST UNIV
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Problems solved by technology

However, the comb filter based on PLC-type MZI generally has a fixed optical path difference between the two arms, which limits its output characteristics to be fixed, which is not conducive to the changeable reconstruction of optical sensing and communication systems; and a single MZI generally cannot obtain flat-top filtering.

Method used

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  • A kind of reconfigurable comb filter based on cascade Mach-Zehnder interferometer and its preparation method
  • A kind of reconfigurable comb filter based on cascade Mach-Zehnder interferometer and its preparation method
  • A kind of reconfigurable comb filter based on cascade Mach-Zehnder interferometer and its preparation method

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preparation example Construction

[0040] The above-mentioned preparation method based on the cascaded Mach-Zehnder interferometer type reconfigurable comb filter comprises the following steps:

[0041] Step 10): Take a silicon substrate, and clean the silicon wafer by wet chemical method. A silicon dioxide buffer layer with a thickness of 15 μm to 20 μm is prepared on the silicon substrate by a thermal oxidation method. Using plasma-enhanced chemical vapor deposition method with silane and nitrogen concentration of 5% S i h 4 :N 2 , the temperature is 250°C-400°C, silicon dioxide is doped with germanium dioxide to obtain a waveguide layer 9 with a thickness of 8 μm, and GeH with a gas concentration of 10% is used 4 : Ar, form a waveguide layer with a thickness of 8 μm, and the difference between the refractive index of the waveguide layer and the refractive index of the silica buffer layer is 0.4%.

[0042] Step 20): On the waveguide layer, use photolithography and etching processes to prepare the PLC chip...

Embodiment

[0051] The preparation method of the cascaded Mach-Zehnder interferometer-based reconfigurable comb filter is introduced below to describe the above preparation method in more detail.

[0052] Step 10): making the silicon dioxide buffer layer 8 and the waveguide 9 . refer to figure 2 As shown, it includes step 101), step 102) and step 103).

[0053] Step 101) Take a silicon substrate, clean the silicon wafer, that is, the substrate 7, by wet chemical method, and remove the dirt on the surface; then, after ultrasonic cleaning and drying with deionized water, the cleaning of the silicon wafer is completed;

[0054] Step 102) Prepare the silica buffer layer 8. There are many methods for preparing the silica buffer layer 8, such as chemical vapor deposition (CVD), flame hydrolysis (FHD), sol-gel method (Sol-Gel), Thermal oxidation (TO), etc. Since the thermal oxidation method can oxidize hundreds of silicon wafers at the same time, it has higher efficiency in actual production...

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Abstract

The invention relates to a cascaded Mach-Zehnder interferometer based reconfigurable comb filter and a preparation method thereof. The filter comprises a planar lightwave circuit (PLC) chip, a first optical fiber array and a second optical fiber array, wherein the PLC chip comprises a silicon substrate, a silicon dioxide buffer layer is arranged on the silicon substrate, a waveguide is arranged on the silicon dioxide buffer layer, a coverage layer is arranged on the waveguide, and the waveguide comprises an input-stage Y branch, a first-length fixing arm, a second-length fixing arm, a first opening arm, a second opening arm, a third opening arm, a fourth opening arm, a first-stage 3dB coupler, a second-stage 3dB coupler and an output-stage 3dB coupler. The method comprises the steps of preparing the buffer layer and the waveguide on the silicon substrate so as to obtain a PLC chip portion, slicing and grinding the PLC chip portion, then, coupling the PLC chip portion with the optical fiber arrays, and finally, connecting corresponding optical fibers. The filter and the method have the advantages of reconfigurability, fine adjustable phase, flat-crest filtering and low-nonlinearity output.

Description

technical field [0001] The invention belongs to the technical field of integrated photonic devices, and relates to a cascaded Mach-Zehnder interferometer-based reconfigurable comb filter and a preparation method thereof. Background technique [0002] Mach-Zehnder Interferometer (full name in English: Mach-Zehnder Interferometer, abbreviation in the text: MZI) as a phase detection optical path structure has been widely used in optical sensing and communication systems. In optical fiber communication, MZI is usually used as optical fiber wavelength division multiplexer, optical modulator, optical switch and wavelength converter, etc.; in optical sensing system, due to its high sensitivity, MZI can be used to measure current, electromagnetic field, temperature, Weak physical quantities such as pressure. Comb filters based on Mach-Zehnder interferometers are key devices in optical communications, especially in dense wavelength division multiplexing systems, which play a key rol...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/293G02B6/125G02B6/132G02B6/136
Inventor 孙小菡蒋卫锋戚健庭
Owner SOUTHEAST UNIV
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