Device and method for measuring elasto-optical coefficient of semiconductor material

Abstract

The invention discloses a device and a method for measuring the elasto-optical coefficient of a semiconductor material. The device sequentially comprises a light source, a wave chopper, a polarizer, a phase modulator, a polarization analyzer, a spectrometer, a photoelectric detector, a signal collecting system and a computer control system along a light path, wherein light emitted by the light source becomes light with intensity modulated periodically after passing through the light chopper, and becomes linearly polarized light after passing through the polarizer; the linearly polarized light is radiated to a sample after passing through the phase modulator, and approximate vertical incidence is guaranteed; reflection light passes through the polarization analyzer, then passes through the spectrometer, and is finally received by the photoelectric detector, and the reflection light is controlled and is subjected to data acquisition through the signal collecting system by utilizing the computer control system. According to the invention, continuous adjustable uniaxial strain is applied to the sample by adopting a reflection difference spectrum; the refractive index and the absorption coefficient differences are obtained according to the differences of two mutually vertical crystal orientation reflection coefficients in a plane of the semiconductor material; and the variation of elasto-optical coefficient along with the wavelength of an optical wave is obtained by utilizing a crystal elasto-optical coefficient array and the applied uniaxial strain.

Description

technical field [0001] The invention relates to the technical field of measuring the elasto-optic coefficient of semiconductor materials, in particular to a device and method for measuring the elasto-optic coefficient of semiconductor materials. Background technique [0002] Wurtzite semiconductor materials are called the third-generation semiconductor materials, because the wide bandgap can make optical waveguides covering from near ultraviolet to near infrared, the research on the influence of strain on the optical properties of waveguides is mainly on the refractive index, and the use of elastic Optical Effects The development of integrated devices for acousto-optic modulation requires the measurement of the elasto-optic coefficient of materials as a function of wavelength. [0003] At present, the commonly used test method for measuring the elasto-optic coefficient of materials is the prism coupling method. The elasto-optic coefficient is determined by measuring samples ...

AI Technical Summary

Problems solved by technology

[0005] In view of this, the main purpose of the present invention is to provide a device and method for measuring the elasto-optic coefficient of semiconductor materials, so as to solve the problems of complex elasto-optic coefficient measurement device and complicated measurement process, and to obtain the elasto-optic coefficients corresponding to different wavelengths through one measurement. light factor purpose

Images