High frequency ultrahigh accelerating and decelerating micro-cutting motion control mechanism driven by gravity centre of linear motor

Abstract

The invention discloses a high frequency ultrahigh accelerating and decelerating micro-cutting motion control mechanism driven by the gravity centre of a linear motor. A single guide rail is adopted for guiding precisely; the moving element comprises a sliding block, a linear motor runner, a workbench, a tool rest, and cutting tools which are symmetrically arranged on two sides of the guide rail, the parallel gravity centers of a plurality of linear motors drive the cutting tools; a controller, a PWM (Pulse Width Modulation) driver, a linear motor group and a position signal detecting element constitute a closed-loop servo feedback system, the digital current direct PWM is adopted by the closed-loop system to control the reciprocating running of the cutting tools, so that the positional accuracy and the linear resolution of the cutting tools can reach the level of micro-nanometer, and the reciprocating micro-cutting action of the cutting tools with high precision and resolution is realized. According to the high frequency ultrahigh accelerating and decelerating micro-cutting motion control mechanism driven by the gravity centre of the linear motor, two-level galloping protection technology is adopted, and the soft limiting and the hard limiting work together to prevent the moving element from galloping. The motion control mechanism is stable in operation, has high positioning accuracy and repeated positioning, strong ultrahigh decelerating and high-frequency responding performance, and is suitable for the technical field of ultraprecise high accelerating and decelerating high resolution micromachining.

Description

technical field [0001] The invention relates to an ultra-precision micro-cutting processing equipment, in particular to a linear motor gravity center-driven high-frequency ultra-high acceleration and deceleration micro-cutting motion control mechanism, which belongs to the technical field of ultra-precision high-acceleration and deceleration high-resolution micro-cutting processing. Background technique [0002] With the rapid development of ultra-precision machining, precision optics, microelectronics and other disciplines, people have higher and higher requirements for small-batch, high-precision, high-quality, high-efficiency ultra-precision machining technology and equipment. In the traditional CNC machining technology field, the motor drives the ball screw to realize the positioning and driving of the tool. Since the backlash of the transmission cannot be eliminated, the positioning accuracy and resolution are low. Secondly, its transmission efficiency is low, high acce...

AI Technical Summary

Problems solved by technology

The guide rail stopper is set at the end of the guide rail, and the impact of the slide plate on the stopper affects the guiding accuracy of the guide rail, thereby reducing the machining accuracy of the tool

The protective cover set on the slide plate is in contact with the fixed body, there is line or surface friction

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