Metal sheet micro-deep drawing automation device and method used under indirect laser shock

An automatic device and metal sheet technology, which is applied in the field of advanced forming of machinery manufacturing and micro-electromechanical system (MEMS) parts processing, can solve problems that affect processing accuracy, errors, and hidden dangers of laser optical path safety, so as to improve safety and avoid human errors. Effect
CN103316987BInactive Publication Date: 2015-03-04JIANGSU UNIV
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Patents(China)
Current Assignee / Owner
JIANGSU UNIV
Publication Date
2015-03-04
Estimated Expiration
Not applicable ยท inactive patent

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Abstract

The invention discloses a metal sheet micro-deep drawing automation device and method used under indirect laser shock. The metal sheet micro-deep drawing automation device comprises a laser generation system, an automatic forming system and a control system. The laser generation system consists of a laser controller, a laser transmitter and an optical fiber. The automatic forming device consists of an end cover, a focusing lens cone, a machine body, a micro-deep drawing working table, a three-dimensional moving chuck, a base, a magnetic field changing device, a turntable multi-station device, a restraint layer-flyer integrated sheet, a restraint layer-flyer integrated sheet storage bin and a recovering device. The metal sheet micro-deep drawing automation device adopts pulse laser as a forming power source, performs energy conversion of optical energy and mechanical energy through the restraint layer-flyer integrated sheet and achieves automation of a micro-deep drawing process for a pulse laser driven flyer loading sheet. The automatic forming system is independent, the machining precision is not interfered by the outside, and personal errors are avoided. A laser path and the micro-deep drawing working table are stored in the machine body, and the safety of experiment operation is improved.
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Description

technical field

[0001] The invention relates to an automatic device for micro-deep drawing of a thin metal plate under indirect laser impact and a method thereof, belonging to the field of advanced forming of mechanical manufacturing and the field of automatic processing, especially the technical field of micro-electromechanical system (MEMS) parts processing. Background technique

[0002] With the rapid development of modern science and technology, and with the continuous improvement of market requirements for technological products, in fields such as aerospace, precision instruments, and biomedicine, the application of micro-devices is becoming more and more extensive, and the demand for micro-components of various materials are increasing, thus promoting a new exploration of the processing technology of micro devices.

[0003] Today's MEMS-oriented micromachining technology and technology are developed on the basis of integrated circuits, mainly relying on LIGA, etching, ...

Claims

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