Protection ring for preventing short circuit of test structure, and manufacturing method and package testing method thereof
A technology for testing structures and manufacturing methods, applied in semiconductor/solid-state device testing/measurement, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as easy hitting of metal wire balls, operation errors, short-circuiting of test structures, etc. The effect of preventing moisture from entering the test structure
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Embodiment 1
[0042] by Figure 7 The flow chart shown in the example, combined with Figure 8 , and describe in detail the manufacturing method of a guard ring for preventing short circuit of the test structure provided by the present invention.
[0043] In step 1, a low-K dielectric layer 100 is formed, grooves are opened in the low-K dielectric layer, and metal is filled to form an interconnection layer with a metal belt-shaped surrounding structure. The interconnection layer formed for the first time is used as the bottom interconnection layer 201 .
[0044]In step 2, step 1 is repeated, and the interconnection layer as described in step 1 is formed on the underlying interconnection layer, and the interconnection layer formed for the second time is used as the bottom metal via 202; and step 1 is repeated, and the bottom metal via The interconnection layer as described in step 1 is formed on the upper layer, and the interconnection layer formed for the third time is used as the sub-bott...
Embodiment 2
[0050] by Figure 9 The flow chart shown in the example, combined with Figure 10 , a package testing method for preventing a short circuit of a test structure provided by the present invention is described in detail.
[0051] In step 10, the guard ring 500 for preventing short circuit of the test structure is formed on the wafer.
[0052] In step 20, the wafer is subjected to water dicing to obtain the protection ring for preventing short circuit of the test structure.
[0053] In step 30, a ceramic base is provided, the ceramic base has a placement area and ceramic base pins, the protective ring for preventing short circuit of the test structure is placed on the placement area, and the prevention ring of the test structure is placed on the placement area. A shorted guard ring with a guarded test structure. In this embodiment, in fact, when the ceramic base can put down the protective ring for preventing the short circuit of the test structure, the larger the cut of the pr...
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